Nano-capacitor three-dimensional integrated structure and manufacturing method thereof

Abstract

The invention discloses a nano-capacitor three-dimensional integrated structure and a manufacturing method thereof. The nano-capacitor three-dimensional integrated structure comprises a first nano-capacitor structure and a second nano-capacitor structure which are formed on the front surface and the back surface of an aluminum foil, the first top metal electrode layer of the first nano capacitor structure is electrically communicated with the second top metal electrode layer of the second nano capacitor structure through the first groove structure, the second groove structure, the aluminum through hole structure, the fourth groove structure and the fifth groove structure; and the first bottom metal electrode layer of the first nano capacitor structure is electrically communicated with thesecond bottom metal electrode layer of the second nano capacitor structure through the third groove structure, the aluminum foil and the sixth groove structure. According to the invention, the capacitance density can be obviously increased, the length of the interconnection line can be shortened, the interconnection resistance and energy loss can be reduced, the process steps can be reduced, the process complexity can be reduced, and the production cost can be effectively reduced.

Description

technical field [0001] The invention belongs to the field of integrated circuit manufacturing, and in particular relates to a three-dimensional integrated structure of nanocapacitors and a manufacturing method thereof. Background technique [0002] Currently, batteries are still the main energy supply components for portable electronic devices. Although battery technology is constantly evolving, there is still a trade-off between battery capacity and volume and weight. Accordingly, some alternative power supply components with large capacity, light weight, and small size have been researched and developed, such as micro fuel cells, plastic solar cells, and energy harvesting systems. In all the cases mentioned above, an energy buffer system is usually required to maintain a continuous and steady energy output. For example, fuel cell systems are generally believed to have slower start-up times and lower kinetic energy. Therefore, a hybrid system in which the fuel cell provi...

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Problems solved by technology

However, the high aspect ratio structures currently used in nanocapacitors are relatively single, which cannot ...

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