A three-dimensional integrated structure of nanocapacitor and its manufacturing method

Abstract

The invention discloses a nano capacitor three-dimensional integrated structure and a manufacturing method thereof. The nanocapacitor three-dimensional integrated structure includes a first nanocapacitance structure and a second nanocapacitance structure formed on the front and back of the aluminum foil, and the first top metal electrode layer of the first nanocapacitance structure passes through the first trench structure and the second trench structure. , the aluminum via structure, the fourth groove structure, the fifth groove structure are electrically connected to the second top metal electrode layer of the second nanocapacitance structure; the first bottom metal electrode layer of the first nanocapacitance structure passes through the third groove The structure, the aluminum foil, and the sixth trench structure are in electrical communication with the second bottom metal electrode layer of the second nanocapacitor structure. The invention can significantly increase the capacitance density and shorten the length of the interconnection line, thereby helping to reduce the interconnection resistance and energy loss. In addition, it can reduce the process steps and process complexity, thereby effectively reducing the production cost.

Description

technical field [0001] The invention belongs to the field of integrated circuit manufacturing, and in particular relates to a three-dimensional integrated structure of nanocapacitors and a manufacturing method thereof. Background technique [0002] Currently, batteries are still the main energy supply components for portable electronic devices. Although battery technology is constantly evolving, there is still a trade-off between battery capacity and volume and weight. Accordingly, some alternative power supply components with large capacity, light weight, and small size have been researched and developed, such as micro fuel cells, plastic solar cells, and energy harvesting systems. In all the cases mentioned above, an energy buffer system is usually required to maintain a continuous and steady energy output. For example, fuel cell systems are generally believed to have slower start-up times and lower kinetic energy. Therefore, a hybrid system in which the fuel cell provi...

AI Technical Summary

Problems solved by technology

However, the high aspect ratio structures currently used in nanocapacitors are relatively single, which cannot increase the storage capacity to a greater extent, thus limiting nanocapacitors as effective energy buffer components

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