LIBS system capable of automatically aligning and focusing

Abstract

The invention provides an LIBS (Laser-induced Breakdown Spectroscopy) system capable of automatically aligning and focusing, which comprises the following steps that a sample to be detected can be translated and rotated, a computer controls a five-axis electric displacement platform to move until the surface of the sample is imaged most clearly on an area array CCD (Charge Coupled Device), and laser is just focused on the surface of the sample to be detected; and the computer controls the five-axis electric displacement system to move the sample to be detected to the clewest imaging position of the surface of the sample on the area array CCD camera, so that automatic alignment and focusing are realized. According to the method, all the aligned and focused sites can be calculated by scanning once to obtain the surface height data of the to-be-detected sample and automatically focusing once, the surface of the to-be-detected sample is quickly moved to the laser focusing position when each ablation site is switched, and the laser beam is ensured to be spatially vertical to the surface of the sample. According to the invention, a sample with an uneven surface can be quickly and automatically aligned and focused, laser is focused on the surface of the sample and a laser beam is vertical to the surface of the to-be-detected sample, so that the signal quality of a spectrum is effectively improved.

Description

technical field [0001] The invention belongs to the technical field of spectrum detection, and more particularly relates to a laser-induced breakdown spectroscopy (Laser Induced Breakdown Spectroscopy, LIBS) system with automatic alignment and focus. Background technique [0002] LIBS technology is to focus high-energy pulsed laser beams on the surface of the sample to generate ablation and associated high-temperature plasma with high brightness. By collecting and analyzing the plasma radiated light and analyzing its atomic, ion and molecular spectral lines, it can be deduced The composition and content of each element in the tested sample. This technology has the advantages of simultaneous detection of multiple elements, simple or no sample preparation, real-time analysis, in-situ detection and remote detection, etc. It is widely used in material processing, food safety, artwork identification, biomedicine, deep space exploration, etc. field. [0003] At present, there ar...

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Problems solved by technology

[0006] In view of the defects of the prior art, the purpose of the present invention is to provide a LIBS system with automatic alignment and focusing, aiming to solve the problem that the laser cannot focus vertically and ablate the surface of the sample when the LIBS technology detects samples with uneven surfaces

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