Monocrystalline silicon rod cutting device and cutting method thereof

Abstract

The invention discloses a monocrystalline silicon rod cutting device in the technical field of monocrystalline silicon. An operation table is arranged on the right side of the top of a base, wherein aconveying motor is installed on the right side of the top of the operation table; two clamping devices of the same structure are symmetrically arranged on the left side of the top of the operation table; a conveying belt is arranged between the two clamping devices through a rotating shaft rod; and the power end of the left side of the conveying motor penetrates through one clamping device to beconnected with the rotating shaft rod on the conveying belt. According to the device, a monocrystalline silicon rod to be machined can be clamped through two auxiliary wheels, conveying of the monocrystalline silicon rod on the conveying belt cannot be influenced, and the conveying stability cannot be influenced while clamping is carried out; through cooperation of power rollers and auxiliary rollers which are arranged in a triangular shape, a diamond wire running at a high speed has good stability; and through cooperation of a hydraulic device, the cutting operation of the monocrystalline silicon rod becomes simple and efficient.

Description

technical field [0001] The invention relates to the technical field of single crystal silicon, in particular to a single crystal silicon rod cutting device and a cutting method thereof. Background technique [0002] Single crystal silicon wafers are made into electronic components through a series of processes. It is cut from the single crystal silicon rod after rolling and chamfering; and the single crystal silicon rod is shaped or pulled in the furnace by zone melting or Czochralski process. Single crystal silicon rods are silicon single crystal rods rearranged according to the crystal lattice arrangement direction of the seed crystal. Single crystal silicon rods need to be truncated during processing. The existing truncation device is unstable. Single crystal silicon rods It cannot be stabilized and transported well, resulting in cumbersome truncation operations. Therefore, we propose a truncation method for single crystal silicon rods. Contents of the invention [00...

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Problems solved by technology

Single crystal silicon rods are silicon single crystal rods rearranged according to the crystal lattice arrangement direction of the seed crystal. Single crystal silicon rods need to be truncated during processing. The existing truncation device is unstable. Single crystal silicon rods Can not be stabilized and transported well, resulting in cumbersome truncation operation, for this reason, we propose a single crystal silicon rod truncation method

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