A kind of manufacturing method of heating substrate for thin film thermal print head
A technology of a thermal print head and a manufacturing method, applied in directions such as printing, can solve the problems of corrosion and damage of the conductive protective film, difficulty in implementing the access scheme, etc.
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Embodiment 1
[0062] manufacture Figures 1 to 3 The heating substrate for the thin film thermal print head with the structure shown, the specific steps include:
[0063] 1) Prepare a parallel plate-shaped insulating substrate 10 composed of Al2O3, print the glass glaze paste on a partial area of the insulating substrate 10, sinter, and form a thermal storage glaze coating on a partial area on one side of the insulating substrate 10 20. The thickness of the thermal storage glaze coating 20 is 20-50 μm.
[0064] 2) Using a cermet target (a composite material target formed of tantalum and silicon dioxide materials), a magnetron sputtering method is used to form a heating resistor layer 30 on the insulating substrate 10 and the glaze coating 20, and the heating resistor layer 30 is formed. The thickness of the layer 30 is 0.03-0.2 μm; the electrode wire layer 40 is formed on the heating resistor layer 30 by the method of magnetron sputtering using an aluminum target, and the thickness of th...
Embodiment 2
[0074] manufacture figure 2 The heating substrate for the thin film thermal print head with the structure shown, the specific steps include:
[0075] 1) Prepare a parallel plate-shaped insulating substrate 10 composed of Al2O3, print the glass glaze paste on a partial area of the insulating substrate 10, sinter, and form a thermal storage glaze coating on a partial area on one side of the insulating substrate 10 20. The thickness of the thermal storage glaze coating 20 is 20-50 μm.
[0076] 2) Using a cermet target (a composite material target formed of tantalum and silicon dioxide materials), a magnetron sputtering method is used to form a heating resistor layer 30 on the insulating substrate 10 and the glaze coating 20, and the heating resistor layer 30 is formed. The thickness of the layer 30 is 0.03-0.2 μm; the electrode wire layer 40 is formed on the heating resistor layer 30 by the method of magnetron sputtering using an aluminum target, and the thickness of the elec...
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