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Evaporation crucible and evaporation device

A crucible and evaporation technology, which is used in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions

Active Publication Date: 2021-02-02
HEFEI VISIONOX TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the prior art, the quality of devices for evaporation of metal or organic film layers of OLED display devices needs to be improved. Therefore, it is necessary to provide a new evaporation crucible to solve the above problems

Method used

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  • Evaporation crucible and evaporation device
  • Evaporation crucible and evaporation device
  • Evaporation crucible and evaporation device

Examples

Experimental program
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Embodiment Construction

[0024] In the current preparation process of OLED devices, evaporation is usually used to prepare various film layers of OLED devices, but the problem of impurities clogging the evaporation crucible is prone to occur during the evaporation process. Taking the vapor-deposited film layer as the cathode as an example, the cathode film layer is mainly vapor-deposited ytterbium and magnesium / silver film layers. However, due to the material characteristics of magnesium and ytterbium, there is a layer of oxide on the surface of magnesium and ytterbium materials. During the evaporation process of magnesium and ytterbium materials, the oxides on the surface of magnesium and ytterbium materials fall off and form Ash (ash), which is easy to The overflow from the evaporation crucible leads to a sharp increase in the content of Particles in the evaporation chamber, which in turn leads to an increase in the amount of particles on the substrate surface, directly reducing the product yield.

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Abstract

The embodiment of the invention relates to the technical field of display screen manufacturing, and discloses an evaporation crucible. The evaporation crucible comprises a crucible body and a filtering device; the crucible body is used for accommodating an evaporation material; the filtering device is arranged in the crucible body, and comprises a central part and a peripheral part surrounding thecentral part; the crucible body comprises a bottom wall used for bearing the evaporation material, and the peripheral part is obliquely arranged in the direction away from the bottom wall; and the central part is used for blocking solid impurities in the evaporation material, a plurality of first through holes are formed in the peripheral part in a penetrating mode, so that the evaporation material passes through the filtering device after being vaporized. According to the evaporation crucible, the impurities in the evaporation material can be filtered, and the evaporation material can be smoothly sprayed out of the evaporation crucible after being vaporized.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of display screen manufacturing, and in particular to an evaporation crucible and an evaporation device. Background technique [0002] OLED (Organic Light-Emitting Diode) is called an organic light-emitting diode. OLED display technology has many advantages such as full solid state, active light emission, high contrast, ultra-thin, low power consumption, fast effect speed, wide working range, easy to realize flexible display and 3D display, etc., so that it is currently used in many display screens , such as on televisions and mobile display devices. Existing OLED devices mainly include organic film layers and metal film layers. [0003] In the prior art, the quality of devices for evaporation of metal or organic film layers of OLED display devices needs to be improved. Therefore, it is necessary to provide a new evaporation crucible to solve the above problems. Contents of the inve...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/12H01L51/56
CPCC23C14/243C23C14/12H10K71/164H10K71/00
Inventor 刘全宝王宝毋炳辉史治化高松邱林林
Owner HEFEI VISIONOX TECH CO LTD
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