Ion probe mass spectrometer and imaging method thereof

An ion probe and imaging method technology, applied in the detection field, can solve the problems of inability to effectively distinguish ions with different mass/charge ratios and low mass resolution, and achieve point-to-point microscopic functions, high imaging efficiency, and mass resolution. rate-enhancing effect

Active Publication Date: 2021-02-02
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In view of this, the purpose of one or more embodiments of this specification is to propose an ion probe mass spectrometer and its imaging method to solve the problem of

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  • Ion probe mass spectrometer and imaging method thereof
  • Ion probe mass spectrometer and imaging method thereof
  • Ion probe mass spectrometer and imaging method thereof

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[0039] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in one or more embodiments of the present specification shall have ordinary meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in one or more embodiments of the present specification do not indicate any order, quantity or importance, but are only used to distinguish different components. "Comprising" or "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "connected" or "con...

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Abstract

The embodiment of the invention provides an ion probe mass spectrometer and an imaging method thereof. Specifically, the ion probe mass spectrometer comprises a compression deflection plate configuredto compress a secondary ion beam generated by scanning and bombarding a sample through a primary ion beam by applying a first voltage according to a time sequence, a mass spectrometer configured to analyze the compressed secondary ion beam, a decompression deflection plate configured to decompress the secondary ion beam passing through the mass spectrometer in time series by applying a second voltage, and an imaging assembly configured to acquire the secondary ion beam image decompressed by the decompression deflection plate. The frequency of the first voltage is the same as that of the second voltage; By means of the technical scheme, on the basis of an ion microscope mode, the secondary ion beam is compressed and decompressed, the mass resolution is improved, meanwhile, the point-to-point microscopy function can be achieved, and the advantage of being high in imaging efficiency is achieved.

Description

technical field [0001] One or more embodiments of this specification relate to the technical field of detection, in particular to an ion probe mass spectrometer and an imaging method thereof. Background technique [0002] Secondary Ion Mass Spectrometry (SIMS for short) or ion probe (Ion probe) is an advanced method for micro-area in situ analysis. The accelerated primary ion beam is used to focus and bombard the surface of the sample to be tested, the surface components of the sample are sputtered out, and some atoms, molecules and atomic groups are ionized, that is, secondary ions, which enter the mass spectrometer after high-pressure acceleration on the sample surface for analysis , to obtain the element and isotope information of the sample in the micro-area. [0003] Using a large (5-30 μm) primary ion beam as the excitation source, a set of ion optical lenses can directly image the secondary ions generated on the surface of the sample through the point-to-point micros...

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Application Information

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IPC IPC(8): H01J49/06H01J49/14H01J49/26G01N27/62
CPCH01J49/061H01J49/26H01J49/14G01N27/62
Inventor 刘宇唐国强李秋立
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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