Ion probe mass spectrometer and imaging method thereof

Abstract

The embodiment of the invention provides an ion probe mass spectrometer and an imaging method thereof. Specifically, the ion probe mass spectrometer comprises a compression deflection plate configuredto compress a secondary ion beam generated by scanning and bombarding a sample through a primary ion beam by applying a first voltage according to a time sequence, a mass spectrometer configured to analyze the compressed secondary ion beam, a decompression deflection plate configured to decompress the secondary ion beam passing through the mass spectrometer in time series by applying a second voltage, and an imaging assembly configured to acquire the secondary ion beam image decompressed by the decompression deflection plate. The frequency of the first voltage is the same as that of the second voltage; By means of the technical scheme, on the basis of an ion microscope mode, the secondary ion beam is compressed and decompressed, the mass resolution is improved, meanwhile, the point-to-point microscopy function can be achieved, and the advantage of being high in imaging efficiency is achieved.

Description

technical field [0001] One or more embodiments of this specification relate to the technical field of detection, in particular to an ion probe mass spectrometer and an imaging method thereof. Background technique [0002] Secondary Ion Mass Spectrometry (SIMS for short) or ion probe (Ion probe) is an advanced method for micro-area in situ analysis. The accelerated primary ion beam is used to focus and bombard the surface of the sample to be tested, the surface components of the sample are sputtered out, and some atoms, molecules and atomic groups are ionized, that is, secondary ions, which enter the mass spectrometer after high-pressure acceleration on the sample surface for analysis , to obtain the element and isotope information of the sample in the micro-area. [0003] Using a large (5-30 μm) primary ion beam as the excitation source, a set of ion optical lenses can directly image the secondary ions generated on the surface of the sample through the point-to-point micros...

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Problems solved by technology

[0004] In view of this, the purpose of one or more embodiments of this specification is to propose an ion probe mass spectrometer and its imaging method to solve the problem of low mass resolution in the ion microscope mode in the prior art and the inability to effectively distinguish between different masses / charges. Technical issues with ratio ions

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