Ion Probe Mass Spectrometer and Its Imaging Method

Abstract

The embodiments of the present specification provide an ion probe mass spectrometer and an imaging method thereof. Specifically, the ion probe mass spectrometer includes: a compression deflection plate, configured to compress the secondary ion beam generated by scanning the sample through the primary ion beam and bombarding the sample by applying a first voltage in time series; the mass spectrometer is configured to The compressed secondary ion beam is analyzed; a decompression deflection plate is configured to decompress the secondary ion beam passing through the mass spectrometer in time sequence by applying a second voltage; wherein the first voltage and the second voltage and an imaging assembly configured to acquire an image of the secondary ion beam decompressed by the decompression deflector. Through such a technical solution, on the basis of the ion microscope mode, the mass resolution can be improved by compressing and decompressing the secondary ion beam, and at the same time, it can satisfy the point-to-point microscopy function, and has the advantage of high imaging efficiency.

Description

Technical field [0001] One or more embodiments of the present specification relate to the field of detection, and more particularly to an ion probe mass spectrometer and its imaging method thereof. Background technique [0002] Secondary Ion Mass Spectrometry, Sims, Ion Probe, is an advanced method of micro-regional analysis. After the accelerated primary ion beam is focused, the surface component is sputtered, and some atoms, molecules, and atomic groups are ionization, i.e., secondary ions, and enter the mass spectrometer after the surface of the sample is accelerated. , Get the element in the micro range, isotope information. [0003] The primary ion beam with large (5 ~ 30 μm) is an excitation source, and the micro function generated by the point-to-point point by a set of ion optical lenses can be used to image the secondary ion generated by the sample surface, and such an imaging manner is called an ion microscope. model. Using the ion microscopy mode, it is possible to ens...

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Problems solved by technology

[0004] In view of this, the purpose of one or more embodiments of this specification is to propose an ion probe mass spectrometer and its imaging method to solve the problem of low mass resolution in the ion microscope mode in the prior art and the inability to effectively distinguish between different masses / charges. Technical issues with ratio ions

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