Device and method for geometric accuracy measurement and error compensation of dicing saw

Abstract

The invention relates to a grinding wheel dicing saw, and particularly provides a device and a method for geometric accuracy measurement and error compensation of a dicing saw. The device comprises agrinding base, a moving platform, a cushion block, a supporting frame, a connecting arm, a lifting rod, a lifting fixed wheel, a front cantilever, a rear cantilever, a cantilever pressing wheel, a lifting guide column, a fixed guide sleeve, a horizontal connecting arm and an electronic micrometer. The precision of the base can be measured and verified, a clearer and more real error condition is displayed according to a measurement result, and local tiny errors are eliminated through manual grinding operation. And finally, a minimum error range is reached, and an error measurement structure isrecorded and ordered, and an actual error condition is simulated by using a nurbs curve principle, and the actual error condition is compensated by using software. Therefore, the highest reference precision is achieved, and the cutting requirement of the high-precision industry is met.

Description

technical field [0001] The invention relates to a grinding wheel scribing machine, and in particular provides a device and method for geometric accuracy measurement and error compensation of the scribing machine. Background technique [0002] The accuracy of the grinding wheel dicing machine and the stability of the system are important factors to ensure the use of the equipment, especially some products in the LED industry have higher requirements for the accuracy of the equipment. The key to ensuring the size and accuracy of the cutting workpiece is closely related to the accuracy of the X and Y axes of the equipment. For example, the flatness of the X-axis will also affect the flatness of the work plate, and the flatness of the Y-axis will also affect the cutting of the spindle. Depth, step accuracy, and more. Reasonable and precise measurement is the key to ensure the accuracy of the equipment. At the same time, even the most precise assembly will have certain errors. T...

AI Technical Summary

Problems solved by technology

The traditional accuracy inspection method of the base and guide rail is generally to use a marble platform with a dial indicator and a collimator to measure and inspect the accuracy. The impact is also relatively large, all of which require fine measurement operations, and a single dial indicator and collimator will also be affected by the measurement method and cover part of the error

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