A device and method for geometric accuracy measurement and error compensation of dicing machine

Abstract

The invention relates to a grinding wheel scribing machine, and in particular provides a device and method for geometric accuracy measurement and error compensation of the scribing machine. The device includes: a grinding base, a mobile platform, a pad, a support frame, a connecting arm, a lifting rod, a lifting fixed wheel, a front and rear cantilever, a cantilever pressing wheel, a lifting guide column, a fixed guide sleeve, a horizontal connecting arm and an electronic micrometer. Instrument; said can measure and verify the accuracy of the base, according to the measurement results show a clearer and more real error situation, and eliminate small local errors through manual grinding. Finally, the minimum error range is achieved. After recording and organizing the error measurement structure, the actual error situation is simulated by the principle of the nurbs curve, and then compensated by the software. In this way, the highest benchmark accuracy can be achieved to meet the cutting needs of high-precision industries.

Description

technical field [0001] The invention relates to a grinding wheel dicing machine, in particular to a device and a method for measuring the geometrical accuracy and error compensation of the dicing machine. Background technique [0002] The precision of the grinding wheel dicing machine and the stability of the system are important factors to ensure the use of the equipment, especially some products in the LED industry, which require higher precision of the equipment. The key to ensuring the size and accuracy of the workpiece to be cut is closely related to the accuracy of the X and Y axes of the equipment. For example, the flatness of the X axis will also affect the flatness of the work plate, and the flatness of the Y axis will also affect the cutting of the spindle. Depth, step accuracy, etc. Reasonable and precise measurement is the key to ensuring the accuracy of the equipment. At the same time, even the most precise assembly will have certain errors. Compensation for sm...

AI Technical Summary

Problems solved by technology

The traditional accuracy inspection method of the base and guide rail is generally to use a marble platform with a dial indicator and a collimator to measure and inspect the accuracy. The impact is also relatively large, all of which require fine measurement operations, and a single dial indicator and collimator will also be affected by the measurement method and cover part of the error

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