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Optical technique for material characterization

A technology of polycrystalline materials and Raman spectroscopy, applied in the field of parameter systems, can solve problems such as inaccuracy and difficulty in interpretation

Pending Publication Date: 2021-03-09
诺威有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, XRD results are highly qualitative and considered inaccurate, and are often very difficult to interpret

Method used

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  • Optical technique for material characterization
  • Optical technique for material characterization
  • Optical technique for material characterization

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Embodiment approach

[0083] According to some embodiments of the invention, the following are several specific system aspects necessary for the method:

[0084] - Numerical aperture (NA):

[0085] (a) A high numerical aperture is necessary to allow efficient collection of Raman signals with short acquisition times. In the current context, a high NA also results in a small spot size, as shown by the diffraction:

[0086]

[0087] where λ is the wavelength. Therefore, high NA can characterize small grain sizes.

[0088] It should be noted that Equation 4 is simplified for clarity - for Raman metrology, the illumination, and collection wavelengths are slightly different, and the illumination and collection NAs may be different.

[0089] (b) Controlling the illumination NA and / or collection NA affects the measured spot size, ie the number of grains within the spot can be changed, and thus affect the grain statistics. Specifically, measurements can be made at a set of different NA values ​​(illu...

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Abstract

A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spotsat multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.

Description

technical field [0001] The present invention relates to systems and methods for characterizing crystalline materials. More specifically, the present invention relates to systems and methods for defining parameters of crystalline materials. Background technique [0002] Polycrystalline materials are a ubiquitous form of matter with important practical applications in many industries. Precise measurement and control of grain size is often required to ensure proper properties of polycrystalline materials. A clear example of this is the use of polycrystalline materials in the semiconductor industry, where polycrystalline materials are used in numerous process steps and have multiple functions for front-end, back-end, logic and memory products. [0003] Polycrystalline materials are made up of multiple nanocrystals ("grains"), each consisting of the atomic structure of a perfect crystal, but with different orientations. The average size of these grains affects the properties o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/268G01N21/21G03F7/20
CPCG01N21/21G01N21/65G01J3/44G01J3/0208G01J3/0224G01J3/024G01J3/027G01J3/10G01J3/2823G01J3/06G01J3/2803G01J2003/283
Inventor 吉拉德·巴拉克约纳坦·奥伦
Owner 诺威有限公司