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A kind of hexachlorodisilane purification device and method

A technology of hexachlorodisilane and purification method, which is applied in the field of hexachlorodisilane purification device containing pentachlorodisilane, can solve the problems such as inability to separate pentachlorodisilane cleanly, achieve improved purity, increase yield, and green purification method Effect

Active Publication Date: 2022-06-28
ASIA SILICON QINGHAI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to overcome the problem that pentachlorodisilane cannot be completely separated from hexachlorodisilane in the prior art, and to provide a hexachlorodisilane purification device and method

Method used

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  • A kind of hexachlorodisilane purification device and method
  • A kind of hexachlorodisilane purification device and method
  • A kind of hexachlorodisilane purification device and method

Examples

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Embodiment 1

[0029] like figure 1 As shown, in Example 1, a hexachlorodisilane purification device, the purification device specifically includes a raw material tank 1, a reactor 2 and a cooler 3 that are communicated in sequence; the raw material tank 1 is provided with a raw material inlet 11, and the raw material tank 1 is provided with a heater (not shown in the figure); the reactor 2 is provided with an electrode, and the reactor 2 has a gas interface adapted to the chlorine inlet pipeline; the cooler 3 is provided with a collection port 31. Specifically, the raw material tank 1 , the reactor 2 and the cooler 3 are arranged from bottom to top, the raw material tank 1 is communicated with the lower end of the reactor 2 , and the cooler 3 is communicated with the upper end of the reactor 2 . The heater is used to heat the material, that is, to heat the hexachlorodisilane liquid containing pentachlorodisilane. As an embodiment, the heater is a number of heat pipes suspended on the top of...

Embodiment 2

[0038] This embodiment has the same inventive concept as Embodiment 1, and a method for purifying hexachlorodisilane is provided on the basis of Embodiment 1, and the method specifically includes the following steps:

[0039] S01: The hexachlorodisilane liquid containing pentachlorodisilane is transported to the raw material tank 1 and heated, and the hexachlorodisilane liquid containing pentachlorodisilane begins to vaporize and enters the reactor 2; wherein, the heating temperature is 100- At 300°C, preferably 200°C, a heating pipe can be arranged on the top of the raw material tank 1 to heat the material.

[0040] S02: Pass chlorine gas into the reactor 2, and turn on the power supply of the electrodes in the reactor 2; wherein, the molar ratio of chlorine gas to pentachlorodisilane is 1:1-30:1.

[0041] S03: extract low-boiling hydrogen chloride and chlorine in gas phase, and store high-purity hexachlorodisilane liquid in raw material tank 1 after the reaction is completed...

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Abstract

The invention discloses a hexachlorodisilane purification device and method, which belong to the technical field of hexachlorodisilane purification. The device includes a raw material tank, a reactor and a cooler connected in sequence; A heater is arranged inside the tank; an electrode is arranged inside the reactor, and the reactor has a gas interface adapted to the chlorine gas inlet pipeline; a collection port is arranged on the cooler. The present invention excites chlorine gas by forming an electromagnetic field through electrodes to obtain plasma containing electrons, active chlorine free radicals, free molecules and radiated light. Under the induction of free electrons, radiated light and active chlorine free radicals, the gas phase pentachloride is formed after heating. Disilane first removes a hydrogen group, then combines a chlorine group, and then transforms into hexachlorodisilane, which increases the yield of hexachlorodisilane while improving the purity of hexachlorodisilane.

Description

technical field [0001] The invention relates to the technical field of hexachlorodisilane purification, in particular to a hexachlorodisilane purification device and method containing pentachlorodisilane. Background technique [0002] Hexachlorodisilane is an important electronic gas and is widely used in the field of semiconductor device manufacturing. Hexachlorodisilane (Si 2 Cl 6 ) contains a small amount of pentachlorodisilane (Si 2 Cl 5 H), because the boiling points of the two are close, it is difficult to completely separate pentachlorodisilane from hexachlorodisilane by conventional rectification methods. On this basis, a device and method that can deeply purify hexachlorodisilane invention is necessary. SUMMARY OF THE INVENTION [0003] The purpose of the present invention is to overcome the problem that pentachlorodisilane cannot be completely separated from hexachlorodisilane in the prior art, and provide a hexachlorodisilane purification device and method....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
CPCC01B33/10778
Inventor 张宝顺宗冰陈海宝刘建华王体虎
Owner ASIA SILICON QINGHAI
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