A method for enhancing the photoluminescence signal of antimony-based superlattice materials

Abstract

The invention discloses a method for enhancing the photoluminescent signal of an antimony-based superlattice material, comprising: pretreating a GaSb substrate to remove water vapor and organic matter; raising the temperature of the GaSb substrate to remove the oxide layer of the GaSb substrate at high temperature; Cool the GaSb substrate and grow a GaSb buffer layer on the GaSb substrate; heat up the GaSb buffer layer and then anneal; cool down the GaSb buffer layer, and control the growth temperature, growth rate, beam current ratio and growth interface on the GaSb buffer layer Growing the Sb-based superlattice material; growing the GaSb layer on the surface of the Sb-based superlattice material, cooling the Sb-based superlattice material. In the present invention, by performing a photoluminescence test on the Sb-based superlattice material, the photoluminescent signal is greatly enhanced, the peak position of the luminescence is clear, and the half-peak width is small, and the band gap of the superlattice material can be accurately tested, so that the Sb-based superlattice Lattice materials can be widely used in infrared optoelectronic devices to improve the detection accuracy of infrared optoelectronic devices.

Description

technical field [0001] The invention relates to the technical field of semiconductor infrared detectors, in particular to a method for enhancing photoluminescent signals of Sb-based superlattice materials. Background technique [0002] Infrared thermal imaging has the characteristics of strong anti-interference, long recognition distance, and thermal radiation detection. In recent years, it has been widely used in the fields of security, industry, medicine, and automatic driving. [0003] Infrared optoelectronic devices use a wide range of materials, metals, insulators and superconductors can be used to make infrared detectors. Among them, the special physical properties of antimony (symbol "Sb")-based superlattice materials are very suitable for the manufacture of infrared optoelectronic devices. Sb-based superlattice infrared detectors can respond to light radiation from near-infrared to short-wave infrared, medium-wave infrared, long-wave infrared and far-infrared throug...

AI Technical Summary

Problems solved by technology

However, the surface recombination of Sb-based superlattice materials is serious, which weakens the photoluminescence signal, resulting in inconspicuous photoluminescence signals, and it is difficult to determine the position of the luminescence peak and the band gap of the superlattice material.

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