Mechanical arm and wafer grabbing device
A robotic arm, wafer technology, applied in conveyor objects, transportation and packaging, electrical components, etc., can solve problems such as grasping failure and reducing production efficiency
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[0031] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0032] In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. By analogy, the present invention is therefore not limited to the specific examples disclosed below.
[0033] As described in the background art, when the robotic arm is carrying the wafer, it must carry out the grabbing operation, and the deviation between the wafer and the robotic arm during the wafer grabbing process will cause grabbing failure and reduce production efficiency.
[0034] Whether the robot arm ...
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