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Crystal growth furnace with positioning mechanism and charging method

A technology of positioning mechanism and crystal growth furnace, applied in chemical instruments and methods, crystal growth, mechanical equipment, etc., can solve the problems of affecting crystal quality, large measurement error, low working accuracy, etc., to improve working accuracy, easy operation, The effect of reducing labor costs

Inactive Publication Date: 2021-04-09
SICC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing technology requires repeated adjustments and measurements, cumbersome operations, low work efficiency, and high labor costs; at the same time, the work accuracy is low and the measurement error is large, which cannot meet the strict process requirements, thus affecting the quality of the prepared crystals

Method used

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  • Crystal growth furnace with positioning mechanism and charging method
  • Crystal growth furnace with positioning mechanism and charging method

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Embodiment Construction

[0039] In order to explain the overall concept of the present application more clearly, the following detailed description will be given by way of examples in combination with the accompanying drawings.

[0040] In order to better understand the above-mentioned purpose, features and advantages of the present application, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0041] In the following description, many specific details are set forth in order to fully understand the application, but the application can also be implemented in other ways different from those described here, therefore, the protection scope of the application is not limited by the specific details disclosed below. EXAMPLE LIMITATIONS.

[0042] In addition, ...

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Abstract

The invention relates to a crystal growth furnace with a positioning mechanism and a charging method. The charging method comprises the following steps that a raw material assembly and the crystal growth furnace are provided, the crystal growth furnace comprises the positioning mechanism and a crystal growth furnace body, the positioning mechanism comprises a levelness adjusting assembly, a light source assembly and a supporting piece, and the levelness adjusting assembly and the light source assembly are connected with the supporting piece; according to the result of the leveling assembly, the supporting piece is adjusted to be horizontally installed above the opening of the crystal growth furnace body, a light beam formed by a light source in the light source assembly enters the crystal growth furnace body from the opening and forms a light ring at a target position, the raw material assembly moves to the target position formed by the light ring in the crystal growth furnace body through the bottom opening of the crystal growth furnace body, and charging is completed. The charging method is easy to operate, the operation safety is improved, the crystal growth furnace with the positioning mechanism is easy and convenient to operate, the working efficiency is improved, the working precision is high, and then the quality of prepared crystals is improved.

Description

technical field [0001] The application relates to a crystal growth furnace with a positioning mechanism and a furnace charging method, belonging to the field of crystal growth. Background technique [0002] At present, in the semiconductor crystal growth process, it is necessary to place the raw material components in the specified position in the crystal growth furnace according to the process requirements. The method adopted in the prior art is to adjust the raw material assembly manually based on experience and visual inspection, place the raw material assembly at the roughly required position, and then adjust the horizontal relative position of the raw material assembly with a hand-held distance measuring ruler to complete the operation. [0003] The existing technology requires repeated adjustments and measurements, cumbersome operations, low work efficiency, and high labor costs. At the same time, the work accuracy is low and the measurement error is large, which canno...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B35/00C30B29/36C30B29/06F21V33/00G01B21/18
CPCC30B29/06C30B29/36C30B35/00F21V33/00F21W2131/409G01B21/18
Inventor 沈安宇李钊张耀文张亮湛希栋
Owner SICC CO LTD
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