Differential confocal fixed-surface interference target outer surface defect detection method and device

Abstract

The invention relates to a differential confocal fixed-plane interference target outer surface defect detection method and device, and belongs to the technical field of optical imaging and detection. According to the method, the zero crossing point of a differential confocal light intensity response curve is used for accurately positioning the axial positions of a target (a detected surface) and a camera (a detection surface), so that accurate and automatic focusing imaging of the outer surface is realized. A short coherent light source and a spherical reference mirror are adopted in an interference microscopic light path to generate an outer surface zero interference pattern; and then measuring outer surface defect distribution from the outer surface zero interferogram by using a phase-shifting interferometry. According to the invention, a more accurate adjustment judgment basis is provided for axial position adjustment of the target and the camera by using the accurate positioning characteristic of the differential confocal technology, so that the precision and efficiency of focusing and detection of the outer surface of the traditional interference microscopy method are effectively improved, and a necessary technical guarantee is provided for automatic detection. The invention provides a new technical approach for high-precision, high-efficiency and automatic detection of the outer surface defects of a large batch of targets.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and detection, and is used for the precise detection of outer surface defects of target pills, which is the most core key device in inertial confinement fusion (ICF). Background technique [0002] Inertial confinement fusion (ICF) is not only an ideal technology for human beings to obtain clean energy in the future, but also provides strong support for the development of cutting-edge scientific research in condensed matter physics and astrophysics under extreme high temperature and high pressure conditions. At present, China, the United States, France, Russia, Japan and other countries have vigorously carried out ICF-related research. The ICF precisely focuses multiple high-energy lasers on a tiny hollow spherical target filled with DT fuel, and the shell of the target implodes instantly and uniformly compresses the DT fuel inside to a high-temperature and high-pressure state, thereby achi...

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Problems solved by technology

[0008] The purpose of the present invention is to solve the problem that the existing method is difficult to realize the high-precision and large-scale automatic detection of the defects on the outer surface of the target capsule, and proposes to use the differential confocal positioning technology to realize the accurate and fast automatic positioning of the target capsule and the camera in the interference optical path, and then effectively Guarantee the focusing accuracy and defect measurement accuracy of the outer surface, and provide the key technical basis and guarantee for rapid automatic inspection

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