Heating crucible for vacuum evaporation and vacuum evaporation device

Abstract

The invention provides a heating crucible for vacuum evaporation and a vacuum evaporation device. The heating crucible for vacuum evaporation includes a crucible main body, a main body heating assembly for heating the crucible main body, a heating cover and a nozzle, and a heating cover The body includes an upper cover, a thin heater, and a lower cover that are stacked in sequence. A heat radiation cavity is formed between the upper cover and the lower cover. The nozzle is arranged in the middle of the heating cover and runs through the upper cover. The device and the lower cover; the heat radiation chamber is arranged around the nozzle, and the thin heater heats the nozzle through heat radiation. The invention heats the nozzle by setting the heating cover to prevent the vapor deposition material from cooling down and condensing at the nozzle, blocking the nozzle, and improving the stability of the coating speed. In addition, the nozzle is heated by heat radiation instead of direct contact heating, which can stabilize Accurately control the heating temperature to prevent the decomposition and deterioration of the vapor deposition material due to excessive temperature at the nozzle.

Description

technical field [0001] The invention relates to the technical field of display screen manufacturing, in particular to a heating crucible for vacuum evaporation and a vacuum evaporation device. Background technique [0002] OLED display technology has many advantages such as full solid state, active light emission, high contrast, ultra-thin, low power consumption, fast effect speed, wide working range, easy realization of flexible display and 3D display, etc., making it widely used in many display screens, such as TVs and mobile display devices. Existing OLED devices mainly include an organic film layer and a metal film layer, both of which need to be formed by vacuum evaporation. During the vacuum evaporation process, the material to be evaporated (organic material or inorganic material) needs to be placed in a crucible, and a heating device is installed outside the crucible to heat the material to be evaporated, and the material to be evaporated is vaporized and passed thr...

AI Technical Summary

Problems solved by technology

[0003] Generally, the vacuum evaporation device is only equipped with a heating device on the outer periphery of the crucible. Therefore, the temperature at the outlet of the lower part of the crucible is inconsistent with that at the outlet of the upper part. Generally, the temperature at the outlet of the crucible is relatively low, so the vaporized evaporation material is easy to condense into a solid at the outlet, making the outlet If the size becomes smaller, the amount of sprayed evaporation material will decrease, which will seriously affect the uniformity of film thickness, and the solid will continue to accumulate, and the outlet will be easily blocked, which will not only have a greater impact on product quality, but also affect production efficiency and the convenience of using the evaporation device

In view of the above technical problems, the existing solution is to install a heating device at the position of the crucible cover to heat the crucible cover and the nozzle. On the one hand, the heating device directly transfers heat to the crucible cover and the nozzle through heat conduction, so the heating temperature cannot be controlled stably, and the local temperature of the crucible cover and the nozzle is likely to be too high, resulting in the decomposition or deterioration of the evaporation material

Images