Six-degree-of-freedom orthogonal inertial sensor

Abstract

The invention discloses a six-degree-of-freedom orthogonal inertial sensor, and belongs to the technical field of space precision measurement. In order to overcome the technical problems of low precision and complex structure of a traditional inertial sensor, the six-degree-of-freedom orthogonal inertial sensor comprises an electrode cage assembly and a test mass arranged in the electrode cage assembly; the test mass can perform six-degree-of-freedom motion relative to the center of an electrode cage frame in an electrostatic force driving mode; the electrode cage assembly is provided with three groups of electrodes for simultaneously acquiring the position and angle of the test mass relative to the electrode cage assembly; the test mass is not in contact with the electrodes through electrostatic force; an electric connector is connected with the electrodes through a welding wire; and the three groups of electrodes are orthogonally arranged on X, Y and Z. According to the invention, the problem of insufficient measurement precision of the inertial sensor is solved, the reliability of the system is greatly improved due to the all-metal electrode cage frame structure, the connection with a satellite load system is facilitated, full decoupling is realized on the aspect of degree-of-freedom distribution, and the difficulty of circuit design is reduced.

Description

technical field [0001] The invention belongs to the technical field of space precision measurement, and in particular relates to a six-degree-of-freedom orthogonal inertial sensor. Background technique [0002] Inertial sensors are instruments for measuring weak accelerations and are widely used in aviation and aerospace. In the field of aviation, its measurement accuracy is usually 1×10 -3 g~1×10 -6 g, where g is one unit of the earth's gravitational acceleration. In aerospace-level applications, such as gravity field measurement, it is usually required that the inertial sensor has a measurement accuracy of at least 1×10 -9 g, and in some cutting-edge scientific experiments, such as space laser interference, the accuracy is required to reach 10 -15 more than g. [0003] At this stage, inertial sensors usually use cantilever beams, swing arms or micro-mechanical structures, and the measurement accuracy is low, so they are mainly concentrated in the accelerometer stage. ...

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Problems solved by technology

[0003] At this stage, inertial sensors usually use cantilever beams, swing arms or micro-mechanical structures, and the measurement accuracy is low, so they are mainly concentrated in the accelerometer stage.

Or use a glass cavity structure, complex structure, difficult processing, and cumbersome process flow. The design of this type of sensor measurement distance is small, which limits the upper limit of the measurement resolution of the system, and will be greatly affected during the measurement process such as assembly tests. Shock and vibration, high risk

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