Dry etching lower electrode surface coating milling machining tool and machining method thereof
A technology of electrode surface and milling processing, which is applied in the direction of manufacturing tools, metal processing equipment, metal processing machinery parts, etc., can solve the problems of unfavorable milling processing operation safety, inability to process parts, and deviation of milling tools, etc., to achieve increased smoothness Sexuality, increased stability, the effect of moving forward and backward firmly
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[0036] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.
[0037] Such as Figure 1-Figure 7 As shown, a milling tool for dry engraving the surface coating of the lower electrode comprises a first support plate 2, a second support plate 3 and a fifth support plate 40, the second support plate 3 is located above the first support plate 2, and the second support plate The five support plates 40 are located on one side of the second support plate 3, and the base 1 is welded on the bottom of the first support plate 2. The base 1 can provide a fulcrum for dry engraving the lower electrode surface coating milling tool to ensure the dry engraving of the lower part. For the stability of the electrode surface coating milling tool, a first fixed frame 25 is provided above the base 1, a second hydraulic cylinder 26 ...
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