Fixture for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its application method

A technology of diamond film and fixture, which is applied in the direction of grinding/polishing equipment, grinding machine tools, manufacturing tools, etc., can solve the problem that the diamond film cannot inhibit the initiation and expansion of cracks, so as to inhibit the initiation and expansion of cracks, improve the efficiency of results, and avoid The effect of card powder

Active Publication Date: 2022-04-05
UNIV OF SCI & TECH BEIJING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The invention provides a fixture for suppressing the initiation and expansion of diamond film cracks, which solves the problem that the diamond film cannot inhibit the initiation and expansion of cracks in the existing planarization technology

Method used

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  • Fixture for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its application method
  • Fixture for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its application method

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Embodiment Construction

[0037] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the embodiments and the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0038] On the contrary, the invention covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of the invention as defined by the claims. Further, in order to make the public have a better understanding of the present invention, some specific details are described in detail in the detailed description of the present invention below. The present invention can be fully understood by those skilled in the art without the description of these detailed parts.

[0039] This embodiment proposes a jig and method for suppressing the initiation and expansion of d...

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Abstract

A jig for suppressing the initiation and propagation of diamond film grinding and polishing cracks and its use method. The fixture includes a base, a water tank, a water tank drainage hole, a base limit ring, a tension ring, a buffer pad, and a tension bolt; Prefabricated stress between the surface and the diamond film; the base limit ring is placed outside the base, the water tank is placed on the top of the base limit ring, and the water tank is provided for the gap between the base and the base limit ring through the water drainage holes evenly distributed at the bottom of the tank ; The buffer pad is placed on the bottom surface of the base; the tension ring covers the outer edge of the buffer pad. After the leveling treatment is completed, the entire fixture is directly subjected to rapid heating treatment until the adhesive fails, and the leveling treatment process is completed. The invention improves the complete film rate and processing efficiency of the diamond film, solves the problem of powder sticking, and reduces environmental pollution. It can also be used for flattening the diamond film with cracks, inhibiting the expansion of cracks and increasing the use area of ​​the diamond film.

Description

technical field [0001] The invention belongs to the field of diamond film processing and preparation, and in particular relates to a jig and a method capable of ensuring a complete film rate during the flattening process of diamond film grinding and polishing, and can efficiently complete the flattening process of the diamond film. [0002] technical background [0003] Diamond film has important application value due to its excellent performance. For the above-mentioned diamond film, grinding, polishing and other smoothing processes are necessary before the application of planarization treatment, and the high-efficiency planarization process is also an important prerequisite for the wide application of diamond film. [0004] The diamond film planarization process usually adopts two methods: single-side grinding and double-side grinding. Double-side grinding is to place the material in the grinder, and both sides are free surfaces, which can contact the grinding medium to ach...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B41/06B24B41/00B24B37/30B24B37/34
CPCB24B41/068B24B41/005B24B37/30B24B37/345
Inventor 安康李成明邵思武黄亚博李世谕凃军磊贾燕伟刘金龙陈良贤魏俊俊张建军郑宇亭
Owner UNIV OF SCI & TECH BEIJING
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