Fixture for inhibiting initiation and expansion of grinding and polishing cracks of diamond film and use method

Abstract

The invention discloses a clamp for inhibiting initiation and expansion of grinding and polishing cracks of a diamond film and a use method. The clamp comprises a base, a water tank, water tank drainage holes, a base limiting ring, a tensioning ring, a buffering cushion and a tensioning bolt, the upper top surface of the base of the clamp is a load applying surface, the lower bottom surface is a surface adhered with the diamond film after heating, stress is prefabricated between the surface and the diamond film through cooling, the base limiting ring is placed outside the base, the water tank is placed at the top of the base limiting ring, a water source is provided for a gap between the base and the base limiting ring through the water tank drainage holes evenly distributed in the bottom of the water tank, the buffering cushion is placed on the bottom surface of the base, and the tensioning ring covers the outer edge of the buffering cushion. After the flattening treatment is completed, rapidly heating treatment is directly carried out on the whole clamp until a binder loses efficacy, and the leveling treatment process is completed. According to the clamp for inhibiting initiation and expansion of the grinding and polishing cracks of the diamond film and the use method, the whole film rate and the machining efficiency of the diamond film are improved, the powder blocking problem is solved, and environmental pollution is reduced; and the method can further be used for flattening treatment of the diamond film with the cracks, crack expansion is inhibited, and the usable area of the diamond film is increased.

Description

technical field [0001] The invention belongs to the field of diamond film processing and preparation, and in particular relates to a jig and a method capable of ensuring a complete film rate during the flattening process of diamond film grinding and polishing, and can efficiently complete the flattening process of the diamond film. [0002] technical background [0003] Diamond film has important application value due to its excellent performance. For the above-mentioned diamond film, grinding, polishing and other smoothing processes are necessary before the application of planarization treatment, and the high-efficiency planarization process is also an important prerequisite for the wide application of diamond film. [0004] The diamond film planarization process usually adopts two methods: single-side grinding and double-side grinding. Double-side grinding is to place the material in the grinder, and both sides are free surfaces, which can contact the grinding medium to ach...

AI Technical Summary

Problems solved by technology

[0007] The invention provides a fixture for suppressing the initiation and expansion of diamond film cracks, which solves the problem that the diamond film cannot inhibit the initiation and expansion of cracks in the existing planarization technology

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