Defect detection device for mirror-like object and detection method thereof
A defect detection and object technology, which is applied to measurement devices, optical testing flaws/defects, phase influence characteristic measurement, etc. Wide range of application, strong adaptive effect
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[0061] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.
[0062] Such as figure 1 The defect detection device for mirror-like objects shown includes an optical detection system 1 , an industrial computer 2 , a trigger controller 3 , a motion controller 4 and a three-axis servo module 5 .
[0063] The industrial computer 2 communicates with the motion controller 4, and the three-axis servo module 5 can drive the optical detection system 1 to scan the detected object 9 under the action of the industrial computer 2 and the motion controller 4. The trigger controller 3 can communicate with the three-axis servo module 5 and the optical detection system 1 respectively, and the optical detection system 1 commu...
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