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manipulator

A technology of manipulators and rotating mechanisms, applied in the field of manipulators, can solve the problems of inability to guarantee product uniformity, and achieve the effect of good contact and uniformity assurance.

Active Publication Date: 2022-03-18
HC SEMITEK ZHEJIANG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the uniformity of products in the process cannot be guaranteed only by vertical and horizontal movements

Method used

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Embodiment Construction

[0043] In order to make the purpose, technical solution and advantages of the present disclosure clearer, the implementation manners of the present disclosure will be further described in detail below in conjunction with the accompanying drawings.

[0044] In the semiconductor manufacturing process, chemical etching and chemical cleaning are essential key processes. In the above process, it is necessary to use chemicals to work on the wafer, and these chemicals are highly corrosive, toxic and harmful. In order to avoid these chemicals from causing harm to operators during the operation, manipulators and tanks are usually used to carry out the above operations.

[0045] In the related art, the manipulator is connected to the wafer flower basket, the wafer is placed in the wafer flower basket, the tank is placed under the manipulator, and chemicals are contained therein. The manipulator is driven by a set of mechanisms to move vertically in a direction perpendicular to the hori...

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Abstract

The disclosure provides a manipulator, which belongs to the technical field of machinery. It includes a first rotating mechanism, a second rotating mechanism, a lifting mechanism and a fixture; the first rotating mechanism includes a driver, a rotating shaft, a bushing and a gear box, the output end of the driver is connected with the first end of the rotating shaft, and the second end of the rotating shaft is connected with the gear The shaft sleeve is rotatably sleeved outside the shaft, the first end of the shaft sleeve is connected with the output end of the lifting mechanism, the second end of the shaft sleeve is located in the gear box and can rotate relative to the gear box; the second rotation The mechanism includes a sun gear, a planetary gear, a worm, and a worm gear. The sun gear is rotatably located in the gearbox, and the planetary gear is rotatably located in the gearbox and meshes with the sun gear. The axis of rotation of the planetary gear and the axis of rotation of the sun gear In parallel, the first end of the worm is coaxially connected with the planetary gear, and the second end of the worm is meshed with the worm wheel; the clamp is connected with the worm. The present disclosure can ensure the uniformity of products in the process.

Description

technical field [0001] The disclosure belongs to the technical field of machinery, and in particular relates to a manipulator. Background technique [0002] In the semiconductor manufacturing process, chemical etching and chemical cleaning are essential key processes. In the above process, various highly corrosive, poisonous and harmful chemicals need to be used. In order to avoid these chemicals from causing harm to the operators, usually a manipulator and a tank are used to cooperate in the above process. [0003] In the related art, the manipulator is connected to the wafer flower basket, and the tank accommodates chemicals. The manipulator is driven to move vertically in a direction perpendicular to the horizontal through a set of mechanisms, so as to realize the relative vertical movement between the manipulator and the tank body. The tank body is driven to move horizontally in the horizontal direction by another set of mechanisms, so as to realize the relative horiz...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/10B25J11/00B25J15/00H01L21/02H01L21/3063
CPCB25J15/0019B25J11/00B25J9/102H01L21/3063H01L21/02
Inventor 曹跃飞
Owner HC SEMITEK ZHEJIANG CO LTD