Long Range Optical Self-Referencing Displacement Sensor
A displacement sensor and self-referencing technology, applied in the field of displacement sensors, can solve the problem of low transmittance of sub-wavelength small holes
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[0027] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0028] like Figure 1-9 As shown, the present invention provides a long-range optical self-reference displacement sensor, including a gold film layer 1, an upper glass layer 2, a gap layer 3, a lower glass layer 4 and a silicon substrate 5 in order from top to bottom. The gold film layer 1 is used for Through the current, the gold film layer 1 is etched with double nanoholes 6, the double nanoholes 6 include two intersecting circular nanoholes, and the edges of the double nanoholes 6 are used to accompany the gold film layer 1 to pass through when the charge oscillates The current oscillation generates a magnetic dipole, which includes a ring dipole and a magnetic quadrupole, and two effect blocks 7 arranged side by side are correspondingly arranged in the gap layer 3 under the double nanoholes 6. This effect Block 7 is used to strengthen the ...
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