Double-ring micromechanical gyroscope structure with wide range and high precision

Abstract

The invention particularly relates to a double-ring micromechanical gyroscope structure with a wide range and high precision. The problem that an existing micromechanical vibration gyroscope cannot have both a large range and high precision is solved. The invention discloses a double-ring micromechanical gyroscope structure with wide range and high precision. The double-ring micromechanical gyroscope structure comprises a glass substrate, a harmonic oscillator part and an electrode part, the harmonic oscillator part comprises an annular inner layer resonance mass, an annular outer layer resonance mass, a cylindrical center anchor point, eight block-shaped peripheral anchor points, eight spoke-shaped inner side elastic supporting suspension beams and eight spoke-shaped outer side elastic supporting suspension beams. The electrode part comprises four arc-shaped inner-layer driving modal displacement measuring electrodes, four arc-shaped outer-layer driving modal displacement measuring electrodes, four arc-shaped inner-layer detection modal displacement measuring electrodes, four arc-shaped outer-layer detection modal displacement measuring electrodes, eight pairs of arc-shaped inner-layer control electrodes and eight pairs of arc-shaped outer-layer control electrodes. The structure is suitable for the fields of weapon guidance, aerospace, biomedicine, consumer electronics and the like.

Description

technical field [0001] The invention relates to a micromechanical vibration gyroscope, in particular to a double-ring micromechanical gyroscope structure with large range and high precision. Background technique [0002] Micromechanical vibrating gyro is an angular velocity sensitive device based on the Coriolis effect. It has the advantages of small size, light weight, low power consumption, long life, mass production, and low price. It is widely used in weapon guidance, aerospace, Biomedicine, consumer electronics and other fields have extremely broad application prospects. The specific working principle of the micromechanical vibrating gyroscope is as follows: when there is no angular velocity input, the harmonic oscillator of the micromechanical vibrating gyroscope works in the driving mode, and the output of the micromechanical vibrating gyroscope is zero. When there is angular velocity input, the resonant oscillator of the micromechanical vibrating gyroscope works in ...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the existing micro-mechanical vibration gyroscope cannot have both large range and high precision, the present invention provides a double-ring micro-mechanical gyroscope structure with both large range and high precision

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