Data interaction system and method based on VPX architecture
A data interaction and data technology, applied in the field of data interaction, can solve the problems of low data transmission speed and poor data processing capability, and achieve the effect of improving data transmission speed, high real-time performance and big data memory function.
Active Publication Date: 2021-06-01
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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[0004]
The purpose of the present invention is to provide a data interaction system and method based on VPX architecture, which can solve the problems of low data transmission speed and poor data processing ability in the prior art data interaction system and method based on VME bus architecture
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[0061] The following is attached Figures 1 to 6 and the specific implementation mode, the data interaction system and method based on the VPX architecture proposed by the present invention will be further described in detail. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and all use imprecise scales, which are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In order to make the objects, features and advantages of the present invention more comprehensible, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implemen...
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The invention provides a data interaction system and method based on a VPX architecture. The data interaction system comprises a data control module, an I / O interface module, a data acquisition module and a model calculation module. The data control module is used for receiving a command of the upper computer, performing initialization operation on the whole system and controlling data interaction in the whole system; the I / O interface module is used for realizing data interaction inside and outside the whole system and data intercommunication among all board cards inside the system; the data acquisition module is used for converting the received analog sampling data measured by the measurement subsystem into digital sampling data and sending the digital sampling data to the I / O interface module through an SRIO bus; and the model calculation module is used for carrying out multi-core parallel calculation on the received digital sampling data sent by the data control module, and sending the processed data to the I / O interface module for outputting through an SRIO bus. According to the invention, the data transmission speed is improved, the data transmission delay is reduced, and the data processing capability is improved.
Description
technical field [0001] The present invention relates to the technical field of data interaction, in particular to a data interaction system and method based on VPX architecture. Background technique [0002] The lithography machine, which is the most important tool in the country, is the key core equipment of the current chip production line. The core motion system of the lithography machine has the characteristics of fast motion, high acceleration, large stroke range, and ultra-precision motion. The accuracy of the workpiece table position measurement system directly affects the control performance of the servo system of the workpiece table, thus affecting the system resolution of the lithography machine and the core indicators of overlay accuracy. The design of a new generation of lithography machines with higher performance needs to further improve the control performance of the workpiece table position measurement system and the accuracy of the algorithm, and realize th...
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IPC IPC(8): G06F13/16G06F13/42
CPCG06F13/4282G06F13/1652G06F13/4291Y02D10/00
Inventor 鲍世娟叶浩王献英
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD