Anti-vibration short-coherence space-time hybrid phase-shifting Fizeau interferometer
A Fizeau interferometer and short coherence technology, which is used in the field of optical detection of three-dimensional information on the surface of space objects, and can solve problems such as the influence of time-domain phase-shifted Fizeau interferometers
Active Publication Date: 2021-06-04
HARBIN INST OF TECH
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[0003] The purpose of the present invention is to solve the problem that the time-domain phase-shifting Fizeau interferometer is seriously affected by random error sources such as environmental vibrations. The present invention provides an anti-vibration short-coherent space-time hybrid phase-shifting Fizeau interferometer
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0034] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.
[0035] see figure 1Describe this embodiment, the anti-vibration type short-coherent space-time hybrid phase-shifting Fizeau interferometer described in this embodiment, including a short-coherent laser 1, a first λ / 2 wave plate 2, a polarization beam splitter prism 3, a first angle Axicon prism ...
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The invention discloses an anti-vibration short-coherence space-time hybrid phase-shifting Fizeau interferometer, which relates to the technical field of optical detection of three-dimensional information of the surface of a space object. The problem that the time-domain phase-shifting Fizeau interferometer is seriously influenced by random error sources such as environmental vibration is solved. The device comprises a short coherent laser, a first lambda / 2 wave plate, a polarization splitting prism, a first cube-corner prism, a phase shifter, a second cube-corner prism, a delay platform, a microscope objective, a micro pinhole, a light splitting plain film, a first collimating lens, a standard reference lens, a second collimating lens, a first light splitting prism, a 4f system, a third cube-corner prism, a fourth cube-corner prism, a second lambda / 2 wave plate, a light splitting prism group, a wave plate group, an analyzer and an area-array camera. A short coherent light path structure is combined with a space-time mixed phase shift mode, the advantages of time domain phase shift and space domain phase shift are fully played, and the detection performance of the sensor in a vibration environment is greatly improved. The device is mainly used for collecting the interference pattern of the detected sample.
Description
technical field [0001] The invention relates to the technical field of optical detection of three-dimensional information on the surface of a space object. Background technique [0002] Fizeau interferometer is a kind of high-precision optical detection instrument widely used in the field of industrial production and metrology. It has the characteristics of high precision, good stability and large detection aperture. Since the Fizeau interferometer adopts a partial common path structure, only a short optical path between the reference mirror and the measured sample is non-common between the measurement path and the reference path. Therefore, the measurement error introduced by factors such as temperature and pressure changes has a greater impact. Good suppression ability. At present, commercialized Fizeau interferometers generally use time-domain phase shifting to extract phase information, and a large-load piezoelectric ceramic motion mechanism drives the reference mirror ...
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IPC IPC(8): G01B9/02
CPCG01B9/02075
Inventor 卢丙辉刘国栋刘炳国庄志涛陈凤东甘雨路程
Owner HARBIN INST OF TECH