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Precise displacement measurement method and device based on electro-optical modulation sideband

A technology of precision displacement and electro-optic modulation, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy and high complexity, and achieve the effects of overcoming low measurement accuracy, improving accuracy, and overcoming high complexity

Active Publication Date: 2021-06-11
NAT INST OF METROLOGY CHINA
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  • Description
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AI Technical Summary

Problems solved by technology

The traditional method is to simultaneously lock the Fabry-Perot (Fabry-Perot resonator) interferometer through two laser beams, which has high complexity and low measurement accuracy.

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  • Precise displacement measurement method and device based on electro-optical modulation sideband
  • Precise displacement measurement method and device based on electro-optical modulation sideband
  • Precise displacement measurement method and device based on electro-optical modulation sideband

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Embodiment Construction

[0032] In order to make those skilled in the art understand the core idea of ​​the present invention more clearly, it will be described in detail below with reference to the accompanying drawings.

[0033] An embodiment of the present invention provides a precision displacement measurement device based on electro-optical modulation sidebands, such as figure 1 As shown, it specifically includes a single-frequency narrow-linewidth laser 1, a first electro-optic modulator 2, a second electro-optic modulator 3, a polarization beam splitter prism 4, a quarter-wave plate 5, a coupling lens 6, and a Fabry- The concave mirror 7 of the Perot interferometer and the plane mirror 8 of the Fabry-Perot interferometer, the plane mirror 8 can move left and right.

[0034] The first electro-optic modulator 2 is also connected to a microwave signal generator 10, and the microwave signal generator 10 is connected to a laser frequency locker 11, and the laser frequency locker 11 is connected to t...

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Abstract

The invention belongs to the technical field of precision displacement measurement, and provides a precision displacement measurement method and device based on an electro-optical modulation sideband. The method comprises the steps of: obtaining a first free spectral range delta v1 corresponding to the first cavity length of an interferometer and a second free spectral range delta v2 corresponding to the second cavity length of the interferometer through adjusting the sideband frequency of an electro-optical modulator to make the electro-optical modulator resonate with the interferometer; and calculating the displacement delta L of the interferometer according to the first free spectral range delta v1 and the second free spectral range delta v2. According to the method and device of the invention, by locking resonance between the sideband frequency of the electro-optical modulator and the free spectral range of the interferometer, displacement measurement of the interferometer is converted into measurement of the microwave resonance frequency, so that the accuracy of displacement measurement is improved.

Description

technical field [0001] The invention relates to the technical field of precision displacement measurement, in particular to a precision displacement measurement method and device based on electro-optical modulation sidebands. Background technique [0002] Precision displacement measurement plays an important role in precision manufacturing, advanced sensing, and metrology. The commonly used precision displacement measurement method is mainly based on the laser interferometer method, and the precise measurement of displacement is realized by counting and subdividing the interferometer fringes. The traditional method uses two laser beams to simultaneously lock the Fabry-Perot (Fabry-Perot resonator) interferometer, which has high complexity and low measurement accuracy. Contents of the invention [0003] Aiming at the technical problems existing in the above-mentioned prior art, the present invention provides a precise displacement measurement method and device based on ele...

Claims

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Application Information

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IPC IPC(8): G01B11/02G01B9/02
CPCG01B11/02G01B9/02
Inventor 王建波殷聪
Owner NAT INST OF METROLOGY CHINA
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