High-precision silicon-based piezoresistive pressure sensor

Abstract

The invention discloses a high-precision silicon-based piezoresistive pressure sensor, and belongs to the technical field of silicon-based integrated pressure sensor design. The high-precision silicon-based piezoresistive pressure sensor comprises a thick-film ceramic substrate, wherein the front surface of the thick-film ceramic substrate is provided with an air pressure detection port, the back surface of the thick-film ceramic substrate is provided with a ceramic packaging body, and a thick-film ceramic substrate area in the ceramic packaging body is provided with a silicon-based pressure sensor chip and a servo circuit; and the silicon-based pressure sensor chip is electrically connected in a bonding mode. The high-precision silicon-based piezoresistive pressure sensor has a temperature compensation function, compensation errors are reduced, and the technical requirements of high-precision application occasions can be met.

Description

technical field [0001] The invention belongs to the technical field of silicon-based integrated pressure sensor design and relates to a high-precision silicon-based piezoresistive pressure sensor. Background technique [0002] Silicon piezoresistive pressure sensors have good medium compatibility and long-term stability, high sensitivity, fast dynamic response, high measurement accuracy, and low cost, easy to integrate with the system, and can be mass-produced quickly. They are widely used in Telemetry and propulsion systems of aerospace vehicles, aviation oil pressure detection, deep water detection, medical equipment, individual combat supply systems, automatic driving assistance systems and other military and civilian fields have broad application prospects. Traditional piezoresistive pressure sensors have a small operating temperature range, limited application range, large temperature drift, and large nonlinearity errors, which need to be processed by the post-stage sys...

AI Technical Summary

Problems solved by technology

Traditional piezoresistive pressure sensors have a small operating temperature range, limited application range, large temperature drift, and large nonlinearity errors, which need to be processed by the post-stage system. Therefore, the design of a miniaturized, high-precision silicon-based sensor with temperature compensation function Piezoresistive pressure sensors are of great significance for improving the performance of aerospace detection systems and realizing high-precision integration of weapons and equipment

[0003] Traditional piezoresistive pressure sensors have the following disadvantages: 1. The operating temperature range is narrow

2. Large nonlinearity error and large temperature drift cannot be applied to high-precision applications

The nonlinearity error of traditional piezoresistive pressure sensors is within 1% FS, and the temperature coefficient is within 1% FS / °C. When used in airborne oil pressure control systems, aerospace vehicle control and other fields, the system needs to compensate the sensor output. , which increases the complexity and volume of the system, which is not conducive to the miniaturization and integration of weapons and equipment

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