Detection equipment and optical detection method

Abstract

The invention discloses detection equipment and an optical detection method. The detection equipment comprises a functional outer box, a damping rack, a platform module and an optical detection device. The platform module comprises a transferring device and an air floating platform. The transferring device is arranged on the air floating platform in a crossing mode so as to transfer a to-be-detected piece between the feeding port and the detection station. The optical detection device comprises a main detection camera assembly, a redetection camera assembly and a positioning camera assembly. The optical detection method comprises the steps of feeding and initial positioning, to-be-detected piece feeding, detection positioning, map matching and initial detection, re-detection to obtain a detection result, detection completion and material returning. According to the equipment, the detection method is executed through the main detection camera assembly, the redetection camera assembly and the positioning camera assembly, positioning, initial detection and redetection of to-be-detected pieces of different specifications are achieved, positioning and navigation are accurate, the vibration absorption performance of the rack is good, the equipment cost is low, the detection efficiency and precision are high, the function integration degree of the whole machine is improved, and the whole machine is low in fault rate and convenient to maintain.

Description

technical field [0001] The invention relates to detection equipment and its parts technology, in particular to a detection equipment and an optical detection method. Background technique [0002] For the manufacturing process of motherboards and displays (such as FPC, flexible printed circuit, flexible printed circuit board, FPD, flat panel display-flat panel display) of 3C products such as computer-computer, communication-communication, and consumer electronics-consumerelectronics, it is necessary to The components in each process are inspected, and optical inspection equipment is most used in this type of inspection. Its basic structure includes feeding, testing, blanking, etc., so as to complete the defect detection and / or size measurement of the workpiece to be tested. [0003] However, with the increasingly higher precision requirements and multi-functional integration requirements of testing equipment, as in the prior art, facing the detection of large-area DUTs, FPD ...

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Problems solved by technology

[0003] However, with the increasingly higher precision requirements and multi-functional integration requirements of testing equipment, as in the prior art, facing the detection of large-area DUTs, FPD boards, etc., the current solution is to use multiple CCD cameras in line method, which obviously caused a substantial increase in cost; another solution is to use a single camera plus drag chain to realize reciprocating motion for image scanning detection, which requires too high a speed of reciprocating motion; The high-precision requirements cannot be met, and for the reciprocating motion mode of the drag chain, the DUT cannot ensure high-precision positioning, which also reduces the detection accuracy

[0004] In addition, the traditional transmission mechanism is easy to scratch the test piece, and the pneumatic method is easy to cause vibration of the machine table and the outer cover, resulting in a decrease in accuracy

The large format adopts multi-row and multi-column matrix arrangement of nozzles, which is easy to leave marks on the substrate of the test piece

[0005] Furthermore, the traditional positioning and navigation only uses a mechanical positioning mechanism, and the accuracy cannot meet the requirements

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