A Large Size Ceramic Package Interface Structure

Abstract

The invention belongs to the technical field of pulse power, and specifically discloses a large-size ceramic packaging interface structure, including an insulator provided with a round hole, an inner kovar ring set in the round hole, a stress-relieving ceramic ring, and an inner kervar ring set in the round hole. The inner inner conductor support seat, the outer kovar ring set on the outside of the insulator; a ring-shaped installation cavity is formed between the inner kovar ring and the inner conductor support seat, and the stress-relieving ceramic ring is installed in the ring-shaped installation cavity . The invention can effectively reduce the possibility of air leakage at the interface of the ceramic packaging under the long-time baking condition at 200°C, improve the vacuum degree and vacuum maintenance ability of the system, and has a compact structure and is easy to manufacture.

Description

A large-scale ceramic package interface structure technical field The invention belongs to the technical field of pulse power, be specifically related to a kind of large-size ceramic seal for high-voltage coaxial transmission Install interface structure. Background technique Between the output end of the pulsed power source and the high-power microwave electric vacuum device, an achievable coaxial The insulating interface of transmission to isolate the pulse transmission line and the electric vacuum device, this interface should not only withstand the working medium in the pulse power source The generated static pressure greater than 0.5MPa is also used as the vacuum interface of the microwave electric vacuum device. Ceramic metal seal The way of connecting the structure is an ideal solution to ensure the structural strength of the insulating interface and improve the vacuum performance of the microwave vacuum device. Law. [0003] With the improvement of the desi...

AI Technical Summary

Problems solved by technology

[0004] 1. Due to the large diameter of the ceramic, the unreasonable ceramic and metal sealing structure will directly cause the ceramic to burst during the sealing process;

[0005] 2. The existing technology cannot effectively guarantee that the large-size vacuum insulation interface does not leak air under the baking condition of the maximum temperature of 200 ° C for 5 hours;

[0006] 3. In the process of ceramic sealing, the amount of brazing material is too large, and the positioning is difficult;

[0007] 4. When brazing and sealing, the thermal expansion difference between metal and ceramics is large, and the solder is easy to lose after melting, resulting in insufficient filling in some areas, and eventually resulting in excessive leakage rate in the sealing area;

[0008] 5. In the existing large-size ceramic packaging structure, the brazed sealing surface and the welded joint generally appear at the same time. If the design of the welded joint is unreasonable, it will cause new leaks on the brazed surface and reduce the vacuum of the vacuum insulation interface. performance

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