Piezoresistive pressure sensor signal processing module and integration method thereof

Abstract

The invention discloses a piezoresistive pressure sensor signal processing module and an integration method thereof. The module comprises a voltage conversion unit and a signal processing unit; the voltage conversion unit comprises a voltage stabilizer and a thin-film resistor block; the signal processing unit comprises a bare chip with a built-in temperature sensor, an LTCC substrate and a shell; the voltage stabilizer and the thin-film resistor block are arranged on the front face of the LTCC substrate; the LTCC substrate is provided with a through cavity, the back surface of the LTCC substrate is provided with a blind cavity, and a capacitor is embedded in the blind cavity; a special-shaped boss structure is arranged in the shell, and shell pins are arranged on the bottom face of the shell; the LTCC substrate is arranged in the special-shaped boss structure in the shell in a sleeved manner through the through cavity; the bare chip is arranged on the surface of the special-shaped boss structure, and the bare chip is connected with the LTCC substrate through a bonding wire. The piezoresistive pressure sensor signal processing module is integrated through a three-dimensional assembly technology. According to the piezoresistive pressure sensor signal processing module and the integration method thereof of the invention, the technical difficulties of miniaturized integrated design and high-precision temperature compensation of the sensor signal processing module are solved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor hybrid integrated circuits, and relates to a piezoresistive pressure sensor signal processing module and an integration method thereof. Background technique [0002] As a high-sensitivity and high-precision component, the piezoresistive pressure sensor is one of the key devices such as absolute pressure gauges, flow meters, flow meters, acoustic sensors, and pneumatic process controllers. , air pressure detection and other systems have a very wide range of applications. Traditional piezoresistive pressure sensor signal processing circuits generally have the characteristics of large volume and poor temperature coefficient, which are not conducive to the integration of pressure detection systems in weapons and equipment. The signal processing module of the pressure sensor is of great significance for improving the performance of the pressure detection system and realizing the miniaturization ...

AI Technical Summary

Problems solved by technology

2. The nonlinear error of the circuit is large, which cannot meet the needs of piezoresistive pressure sensors in high-precision compensation

The traditional piezoresistive pressure sensor signal processing circuit uses analog to process the signal, and temperature compensation uses temperature sensitive elements such as thermistors. The compensation accuracy is low, the nonlinear error is large, the reliability is low, and the overall circuit volume is large, which cannot meet the current high requirements. The use requirements of precision compensation

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