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Mach-zehnder-type optical modulator

A modulator and light-shaped technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of difficulty in obtaining impedance matching and refractive index matching, large capacitance, etc.

Pending Publication Date: 2021-07-23
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the capacitance of the optical waveguide is relatively large, so it is difficult to achieve impedance matching and refractive index matching, so it is also necessary to adjust the capacitance of the optical waveguide

Method used

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  • Mach-zehnder-type optical modulator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0038] figure 1 It is a plan view showing the configuration of a Mach-Zehnder type optical modulator 1 (hereinafter, sometimes simply referred to as "optical modulator 1") according to Embodiment 1 of the present invention. First, the outline of the configuration of the optical modulator 1 according to the first embodiment will be described.

[0039] The optical modulator 1 according to Embodiment 1 includes a demultiplexer 4, a multiplexer 5, a signal source 6, a terminal resistor 7, a first optical waveguide 8a as an optical waveguide, and a second optical waveguide 8b as another optical waveguide. , the first traveling-wave electrode 9a and the second traveling-wave electrode 9b.

[0040] The demultiplexer 4 is connected to an optical input portion that is one end of the first optical waveguide 8a and an optical input portion that is one end of the second optical waveguide 8b. The splitter 4 branches the input light 2 and outputs the branched light to the light input part...

Embodiment approach 2

[0103] Figure 5 It is a plan view showing the configuration of a Mach-Zehnder type optical modulator 1 (hereinafter sometimes simply referred to as "optical modulator 1") according to Embodiment 2 of the present invention. Hereinafter, among the constituent elements according to the second embodiment, the same or similar constituent elements as those described above are assigned the same reference numerals.

[0104] Like the optical modulator 1 according to Embodiment 1, the optical modulator 1 according to Embodiment 2 includes a demultiplexer 4 , a multiplexer 5 , a signal source 6 , a terminal resistor 7 , a first optical waveguide 8 a , and a first optical waveguide 8 a. Two optical waveguides 8b, a first traveling wave electrode 9a and a second traveling wave electrode 9b.

[0105] The demultiplexer 4 is connected to an optical input portion that is one end of the first optical waveguide 8a and an optical input portion that is one end of the second optical waveguide 8b....

Embodiment approach 3

[0137] Figure 13 It is a plan view showing the configuration of a Mach-Zehnder type optical modulator 1 (hereinafter sometimes simply referred to as "optical modulator 1") according to Embodiment 3 of the present invention. Figure 14 It is a perspective view showing the configuration of the optical modulator 1 according to the third embodiment. Figure 15 is along Figure 13 A cross-sectional view of line A-A, Figure 16 is along Figure 13 Cross-sectional view of line B-B. Hereinafter, among the constituent elements according to the third embodiment, the same or similar constituent elements as those described above will be assigned the same reference numerals, and the different constituent elements will be mainly described.

[0138] The optical modulator 1 according to Embodiment 3 is different from the optical modulator of Embodiment 2 ( Figure 5 ), a third traveling-wave electrode 9c and a fourth traveling-wave electrode 9d are provided, and first and second termina...

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Abstract

The purpose of the present invention is to provide a technique whereby a Mach-Zehnder-type optical modulator can be reduced in size. In the present invention, a plurality of first and second via holes are provided in a cladding layer along an optical waveguide. This Mach-Zehnder-type optical modulator is provided with: a wide first traveling-wave electrode which is connected to a first semiconductor region via the plurality of first via holes, and which extends having a width and length along the optical waveguide in a plan view; and a wide second traveling-wave electrode which is connected to a second semiconductor region via the plurality of second via holes, and which extends having a width and length along the optical waveguide in a plan view.

Description

technical field [0001] The invention relates to a Mach-Zehnder type optical modulator. Background technique [0002] We are using a cloud service based on the increase in information terminals and large-capacity communication due to the spread of smartphones. In recent years, the increase in capacity of optical communication systems that modulate optical signals using electrical signals has been promoted due to the expansion of the use of such cloud services. In order to cope with this increase in capacity, it is required to increase the bit rate of the modulation signal in the optical transceiver. In increasing the bit rate, there are methods of increasing the degree of signal multiplexing and methods of increasing the modulation speed. [0003] In the Mach-Zehnder type optical modulator (MZM: Mach-Zehnder Modulator), which is the mainstream of optical modulators used in basic systems with very small wavelength chirp and used for long distances, it is widely used as a met...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/025
CPCG02F1/2255G02F1/2257G02F1/212
Inventor 中村茉里香林周作秋山浩一
Owner MITSUBISHI ELECTRIC CORP