Three-axis gyroscope

Abstract

The invention provides a three-axis gyroscope, which comprises a first driving frame, a second driving frame, an X / Y gyroscope structure and a Z gyroscope structure, wherein the first driving frame can perform resonant motion along the X axis; the second driving frame is parallel to the first driving frame and is spaced from the first driving frame by a preset distance, and the second driving frame can perform resonant motion opposite to the first driving frame along the X axis; the X / Y gyroscope structure is coupled between the first driving frame and the second driving frame; the Z gyroscope structure is coupled between the first driving frame and the second driving frame and is positioned on one side of the X / Y gyroscope structure; and the X / Y gyroscope structure and the Z gyroscope structure are mutually independent, and the X / Y gyroscope structure and the Z gyroscope structure are both driven by the first driving frame and the second driving frame together. The three-axis gyroscope is reasonable and compact in overall structure and high in integration level, orthogonal errors can be reduced, and the detection precision is improved.

Description

【Technical field】 [0001] The invention relates to the technical field of micromechanical systems, in particular to a three-axis gyroscope. 【Background technique】 [0002] Gyroscope is a sensor used to measure angular rate and is one of the core devices of inertial technology. It plays an important role in the fields of modern industrial control, aerospace, national defense and consumer electronics. [0003] The development of gyro can be roughly divided into three stages: [0004] The first stage is the traditional mechanical rotor gyro, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles. However, it has a large volume, complicated manufacturing process, expensive price, long cycle and It is not suitable for mass production; the second stage is optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, mainly using the Sagnac effect, which has...

AI Technical Summary

Problems solved by technology

In current consumer applications, it is generally a single-chip three-axis gyroscope, which is characterized by drive sharing and a reasonable layout of the X / Y / Z gyro masses. However, the three-axis gyroscope is also faced with large size and low integration High, the problem of large quadrature error

[0006] See Chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect. The three-axis gyroscope disclosed in this patent has a cleverly designed steering structure. The left and right mass blocks are used to detect the Y / Z axis angular rate. The block is used to detect the X-axis angular rate, but obviously its integration is not high, and the Y / Z mass blocks share the mass block to easily generate coupling; continue to refer to the Chinese invention patent CN110926445A, which discloses a three-axis MEMS gyroscope, the patent The disclosed micro-gyroscope structure is a shared drive, and its innovation is that the X / Y gyroscope structure is novel in design, and the X / Y-axis gyroscope interacts and is arranged in the middle of the drive frame, and is supported by a central anchor point. The Z-axis gyroscope The gyroscopes are distributed on both sides of the X / Y gyroscope and connected to the middle gyroscope structure

Its overall structure design is novel and reasonable, and its integration is high, but its Z-axis gyroscope is not directly decoupled, so it may face the problems of low sensitivity and large quadrature error

[0007] Therefore, it is urgent to propose a new technical solution to solve the problems of low integration and large orthogonal error of the three-axis gyroscope in the prior art

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