Touch panel, preparation method and display device

A touch panel and bottom surface technology, which is applied in the directions of instruments, computing, and electrical digital data processing, etc., can solve problems such as low production efficiency, long production cycle, and complicated process flow, and achieve simple structure, improved production efficiency, and simplified process. Effect

Pending Publication Date: 2021-08-06
SHANGHAI TIANMA MICRO ELECTRONICS CO LTD
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AI-Extracted Technical Summary

Problems solved by technology

[0003] In order to realize the touch function of the display device, it is usually necessary to introduce touch electrodes into the display device. Different touch electrodes are insulated from each other, and bridges need to be provided between adjacent touch electrodes fo...
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Method used

Simultaneously the first photoresist 122 of the first layer and the first photoresist 135 of the second layer are developed, then the photoresist material of the intermediate channel region 121a of the first photoresist 122 of the first layer is removed, The middle channel 121 is formed, and the photoresist material in the first channel opening area 131a of the first photoresist 135 of the second layer is removed to form the first channel opening area 131. Similarly, the second channel opening area 132a forms the second channel The opening 132 , the first passage opening area 131 , the intermediate passage 121 and the second passage opening 132 are sequentially connected to form the underground passage structure 14 shown in FIG. 3 . Referring to FIG. 3 , so far, the developed first layer of first photoresist 122 forms the first structural layer 12 , and the developed second layer of first photoresist 135 forms the second structural layer 13 . In this embodiment, the photoresist is directly used to form the upper and lower isolation channels bounded by the bridge structure 133, and the remaining photoresist is used as the film layer of the touch panel, and the photoresist does not need to be removed. While reducing the production materials of the control panel, the process technology of the touch panel is greatly saved.
The boundary L1 of the first passage opening 131 in the present embodiment refers to the position farthest away from the second passage opening 132 on the side wall 13a of the first passage opening 131, likewise, the boundary of the second passage opening 132 L2 refers to the position farthest from the first passage opening 131 on the side wall 13a of the second passage opening 132, and the distance between the boundary L1 of the first passage opening 131 and the boundary L2 of the second passage opening 132 is the first distance d1, the first distance d1 is the total width spanned between the first channel opening 131 and the second channel opening 132 . The second distance d2 between the boundary L3 and the boundary L4 of the middle channel 121 is the maximum distance between the sidewalls 12 a of the middle channel 121 along the first direction X, and the second distance d2 is the total width spanned by the middle channel 121 . In this embodiment, the total width spanned between the first channel opening 131 and the second channel opening 132 is greater than the total width spanned by the middle channel 121, so that sputtered atoms can enter the middle through the first channel opening 131 and the second channel opening 132. The channel 121 prevents the conductive layer 15 deposited in the intermediate channel 121 from breaking, and also facilitates depositing a conductive layer on the sidewall 13a of the channel opening and the sidewall 12a of the intermediate channel 121 along the slope between the channel opening and the intermediate channel 121 15. Avoid the problem of discontinuous film formation of the conductive layer 15 during the deposition process, and improve the touch performance and the production yield of the touch panel.
The preparation method of the touch panel provided in this embodiment adopts double-layer first photoresist to form an underground channel structure, and only two exposures and one development process can be used to form upper and lower two-layer isolation channels, and the manufacturing process is simplified. The first photoresist is used as the film layer structure of the touch panel, which effectively saves the cost of consumables for the touch panel. In addition, the second photoresist used for patterning the conductive layer can also be used as the film layer structure of the touch panel, further saving consumables of the touch panel.
[0042] The conductive layer on the side of the bridge structure 133 away from the substrate 11 can be etched to form a first connection portion 153, and the conductive layer penetrated into the middle channel 121 forms a second connection portion 154, and the adjacent first electrode 151 can pass through The first connecting portion 153 on the bridge structure 133 is connected, and the adjacent second electrodes 152 can be connected through the second connecting portion 154 in the middle channel 121 . The first connection part 153 and the second connection part 154 are respectively arranged on opposite sides of the bridge structure 133, and are electrically insulated from each other so as not to interfere with each other, effectively avoiding the gap between the first electrode 151 and the second electrode 152. There are problems such as short circuit or signal interference. Moreover, in this embodiment, the first electrode 151, the second electrode 152, the first connecting portion 153, and the second connecting portion 154 can be formed through one deposition and patterning of the conductive layer 15, that is, the mutual capacitance touch electrodes are adopted. The touch panel of the mutual capacitance touch electrode in the prior art requires two deposition and patterning treatments of the conductive layer, wherein the deposition and patterning treatment of the conductive layer is used to form the touch electrode, Another deposition and patterning of the conductive layer is used to form the jumper layer connecting the touch electrodes. Compared with the above-mentioned prior art, this embodiment can form a bridge structure through the deposition and patterning of the conductive layer once. The upper and lower metal layers of...
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Abstract

The invention discloses a touch panel, a preparation method and a display device. The preparation method of the touch panel comprises the steps: forming a first structural layer and a second structural layer which are sequentially away from a substrate on the substrate; forming a first channel opening, a middle channel and a second channel opening which are communicated in sequence in the first structural layer and the second structural layer; forming a middle channel in the first structure layer; forming a first channel opening and a second channel opening in the second structure layer, and forming a bridge-shaped structure between the first channel opening and the second channel opening; depositing a conducting layer on the second structure layer, and forming first electrodes and second electrodes which are insulated from each other on the conducting layer, the conducting layer located on the side, away from the substrate, of the bridge-shaped structure forms a first connecting part, and the adjacent first electrodes are electrically connected through the first connecting part, and the adjacent second electrodes are electrically connected through a second connecting part formed by the conductive layer infiltrated into the middle channel. According to the technical scheme provided by the invention, the touch panel which is simple in process and high in production efficiency can be realized.

Application Domain

Input/output processes for data processing

Technology Topic

Touch panelElectrically conductive +3

Image

  • Touch panel, preparation method and display device
  • Touch panel, preparation method and display device
  • Touch panel, preparation method and display device

Examples

  • Experimental program(1)

Example Embodiment

[0034] The embodiment of the present invention provides a method of preparation of a touch panel. figure 1 It is a flow chart of the preparation method of a touch panel according to an embodiment of the present invention, such as figure 1 As shown, the preparation method of the touch panel of the present embodiment includes the steps of:
[0035] S101 provides a substrate.
[0036] S102, forming a first structural layer and a second structural layer that are sequentially away from the substrate on the substrate; the first structural layer and the second structural layer form an underground channel structure; the underground channel structure includes the first channel opening, intermediate The channel and the second channel opening; the first structural layer is formed with an intermediate passage; the second structural layer forms a first channel opening and a second channel opening, and a bridge structure is formed between the first channel opening and the second channel opening.
[0037] figure 2 It is a schematic structural diagram of a first structural layer and a second structural layer provided in the embodiment of the present invention. image 3 Yes figure 2 Schematic diagram of the cross-sectional structure along section A-A ', reference figure 2 and image 3 First, the substrate 11 is provided, and the underground channel structure 14 is formed by the first structural layer 12 and the second structural layer 13 on the substrate 11. The underground passage 14 includes a first passage opening 131, an intermediate passage 121, and a second channel opening 132 in which it are sequentially communicated. like Figure 4 Distance Figure 4 Yes figure 2 A structural diagram of the first structural layer, in this embodiment, the intermediate channel 121 is disposed in the first structural layer 12, such as figure 2 As shown, the first channel opening 131 and the second channel opening 132 are both provided in the second structural layer 13, and a bridge structure 133 is formed between the first passage opening 131 and the second channel opening 132 of the second structural layer 13, Or figure 2 As shown in the plane parallel to the substrate 11, the bridge structure 133 is located above the intermediate passage 121 and across the sides of the width direction of the intermediate passage 121.
[0038] S103, a conductive layer is deposited on the second structural layer; the conductive layer penetrates into the intermediate passage through the first passage opening and the second channel opening.
[0039] exist figure 2 and image 3 The first structural layer 12 and the second structural layer 13 deposits the conductive layer, such as Figure 5 Distance Figure 5It is a schematic cross-sectional structure of a deposition conductive layer on the second structural layer according to an embodiment of the present invention. The conductive layer 15 is prepared to be prepared on the substrate 11, the first structural layer 12, and the second structural layer 13, and the conductive layer 15 may be aluminum, titanium aluminum, or other metal, or indium oxide (Indium Tin Oxide). , ITO, other conductive oxides, as long as the conductivity can meet the touch requirements. In this embodiment, the conductive layer 15 can be formed by sputtering method, and the underground passage structure 14 formed by the first structural layer 12 and the second structural layer 13, the sputter atoms form the conductive target of the conductive layer 15 will deposit The upper surface of the bridge 133 and the lower side of the underground passage structure 14. The principle of deposition in the underground channel structure 14 is a shadow shadow effect, and there are a variety of sputtering atoms to reach the underground channel structure 14. For example, the first type: the collision between the collisions or magnetic fields between the sputter atoms causes a partial sputter atom to be incident in the intermediate channel 121 under the bridge structure 133 and deposit; the second: hit the first channel opening 131 or The sidewall 13a of the second passage opening 132 and the sputter atom of the side wall 12a of the intermediate passage 121 can be bounced into the intermediate channel 121 under the bridge 133.
[0040] S104, patterned the conductive layer to form a first electrode, a second electrode, and a conductive layer located on the side of the bridge structure, and the adjacent first electrode The first connection portion is electrically connected, and the adjacent second electrode is electrically connected by a second connection portion formed from a conductive layer in the intermediate channel.
[0041] Image 6 It is a schematic structural diagram of a touch panel provided by the embodiment of the present invention. Figure 7 Yes Image 6 A cross-sectional structure of the tactile panel along line B-B '. The conductive layer 15 is patterned to form an insulating first electrode 151 and the second electrode 152, the first electrode 151, and the second electrode 152 is a touch drive electrode, and the other is a touch sensing. The electrodes are fitted to achieve the mutual capacitance touch of the touch panel to determine the touch position.
[0042] The bridge-like structure 133 diffuses from the conductive layer on the side of the substrate 11 to form the first connecting portion 153, penetrate into the conductive layer in the intermediate passage 121 form a second connecting portion 154, adjacent the first electrode 151 can pass through the bridge structure. The first connecting portion 153 on 133 is connected, and adjacent second electrodes 152 can be connected via the second connecting portion 154 in the intermediate channel 121. The first connecting portion 153 and the second connecting portion 154 are respectively disposed on both sides of the bridge structure 133, and electrically insulated from each other without interfering with each other, effectively avoiding the first electrode 151 and the second electrode 152 between the first electrode 151 and the second electrode 152. There is a problem such as short circuit or signal interference. Further, in the present embodiment, the first electrode 151, the second electrode 152, the first connecting portion 153, the second connecting portion 154 are used by the primary conductive layer 15, and the second connecting portion 154, that is, an interactive touch electrode. The touch panel, and the touch panel of the mutual capacitance touch electrode in the prior art requires deposition and patterning treatment of the two conductive layers, wherein the deposition and patterning process of the primary conductive layer is used to form a touch electrode. The deposition of the other conductive layer and the patterning process are used to form a transparo layer to which the touch control electrode is connected, and the present embodiment can form a bridge structure through the deposition and patterning of the primary conductive layer, which is compared to the above-described prior art. 133 Upside down two-layer metal insulation to prepare a cross-sectional intersecting touch electrode structure, effectively simplifying the process flow, reducing the desired conductive layer 15 deposition molding and patterning, saving process and consumables.
[0043] Optionally, the extended direction of the second connecting portion 154 and the extension direction of the bridge 133 intersects, in particular, the extension direction of the second connecting portion 154 and the extended direction of the bridge structure 133 is perpendicular to the adjacent The second electrode 152 is connected to avoid interference with the first electrode 151.
[0044] The touch panel preparation method in the present invention is provided on the substrate, and the first structural layer and the second structural layer in which the substrate are sequentially away, and the underground channel structure is formed by the first structural layer and the second structural layer. The intermediate channel in the underground channel structure is formed, and the second structural layer forms a first channel opening and the second channel opening in the underground channel structure, and also forms a bridge structure between the first channel opening and the second channel opening. A channel opening, an intermediate passage, and a second channel opening are connected, and a bridge structure is formed on the intermediate channel, and the conductive layer is deposited on the second structural layer to form an insulating first electrode and the second electrode, the conductive layer can be simultaneously Deposited into the bridge structure and the intermediate passage, and realizes the insulation of the upper and lower conductive layers on the channel, and the bridge structure can be formed, and the second connection portion is formed in the intermediate channel, and the adjacent first electrode passes the first The connecting portion is connected, adjacent the second electrode is connected by the second connection portion. During the preparation of the touch panel, only the deposition of the primary conductive layer is required, that is, the structure of the cross-sectional intelliral touch electrode structure can be formed, which reduces the conductive layer deposition required for the structure of the conveyor of the touch electrode structure. The number of molding and patterning treatment, the structure is simple, simplified the process process, saves consumables, and effectively improves the productivity of the touch panel.

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Description & Claims & Application Information

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