An arc glow discharge device
A glow discharge and arc technology, applied in the field of discharge, can solve the problems of increasing equipment investment burden, cumbersome and complicated process, etc., and achieve the effect of simplifying process and reducing cost
Active Publication Date: 2022-03-29
JILIN UNIV
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Problems solved by technology
[0003] Glow discharge can achieve a low suitable temperature, but it needs a vacuum and low pressure environment or ignition under low pressure. The use of vacuum will greatly increase the equipment investment burden and make the process cumbersome and complicated
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[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on The embodiments of the present invention and all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0023] see figure 1 , an arc glow discharge device, comprising:
[0024] The power supply unit provides suitable voltage, resistance, capacitance and inductance for the electrode unit;
[0025] The electrode unit, the vibrating electrode generates an arc and ignites the glow discharge under atmospheric pressure to obtain a uniform and stable glow discharge or arc glow mixed discharge;
[0026] The electrode control unit controls the electrode ...
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The invention discloses an arc glow discharge device, which relates to the field of discharge. The arc glow discharge device comprises: a power supply unit, which provides suitable voltage, resistance, capacitance, and inductance for an electrode unit; The glow discharge is ignited under atmospheric pressure to obtain a uniform and stable glow discharge or arc glow mixed discharge; the electrode control unit controls the electrode unit to work or rest; the control unit controls the electrode unit by controlling the electrode control unit to realize the control of the temperature around the arc Control; the output end of the power supply unit is connected to the first input end of the electrode unit. Compared with the prior art, the beneficial effect of the present invention is: this scheme uses the arc generated by the vibrating electrode to ignite the glow discharge under atmospheric pressure, and can obtain uniform and stable The advanced glow discharge or arc glow mixed discharge can get a more stable and more suitable atmosphere for crystal growth, without vacuum equipment, which greatly reduces the cost and simplifies the process.
Description
technical field [0001] The invention relates to the field of discharge, in particular to an arc glow discharge device. Background technique [0002] Arc and glow discharge can generate heat and produce a large number of active particles, which are widely used in production and life. Such as welding machine, DC arc diamond growth system. The heat generated by the arc is huge, which will cause the surrounding temperature to rise rapidly, and burn the surrounding objects in a short time. The active particles produced by the electric arc will only grow on the crystal at a lower suitable temperature. Applying arc discharge to crystal growth requires that the atmosphere around the arc be maintained at a low temperature while the arc is being discharged. [0003] Glow discharge can achieve a low suitable temperature, but it needs a vacuum and low pressure environment or ignition under low pressure. The use of vacuum will greatly increase the equipment investment burden and make ...
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IPC IPC(8): C30B35/00C30B29/04
CPCC30B35/00C30B29/04
Inventor 陈海勇陈熙野姜志刚
Owner JILIN UNIV