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Terahertz waveguide sensing device based on Fano resonance coupling resonant cavity and preparation method thereof

A technology of resonant coupling and sensing device, applied in the field of terahertz subwavelength structure sensing, can solve the problems of large size, unfavorable integration, complicated preparation process, etc., achieving the effect of small size, easy integration, and solving mutual interference

Active Publication Date: 2021-08-24
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In the terahertz frequency band, people have extensively studied the realization of Fano resonance based on the periodic array structure of metamaterials or metasurfaces. However, the inventors found that the size of the structure is large, which is not conducive to integration, and the preparation process is cumbersome; in addition, in terahertz In the terahertz frequency band, there are few discussions on the realization of Fano resonance based on the structure of MDM waveguide coupling resonator. The introduction of MDM waveguide and resonator into the terahertz frequency band for the realization of Fano resonance is helpful for reducing device size, simplifying the manufacturing process, and improving Q factor plays a crucial role in optimizing the performance of Fano resonance-based refractive index sensors

Method used

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  • Terahertz waveguide sensing device based on Fano resonance coupling resonant cavity and preparation method thereof
  • Terahertz waveguide sensing device based on Fano resonance coupling resonant cavity and preparation method thereof
  • Terahertz waveguide sensing device based on Fano resonance coupling resonant cavity and preparation method thereof

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Embodiment 1

[0047] Such as figure 1 with figure 2As shown, the terahertz waveguide sensor device based on Fano resonance coupling resonator in this embodiment includes a substrate 1 and a waveguide sensing unit, the waveguide sensing unit is arranged on the substrate 1, and the waveguide sensing unit includes Waveguide 2, rectangular resonant cavity 3 and metal wall 4, the rectangular resonant cavity 3 is directly connected to one side of the waveguide 2 in a direction perpendicular to the waveguide 2, and the metal wall 4 is arranged at a set distance on one side of the rectangular resonant cavity 3 In the waveguide medium, the center of the metal wall is provided with an aperture; the direction of the rectangular resonant cavity is kept parallel to the polarization direction of the electric field, and the input end of the waveguide 2 is used to receive the terahertz wave, so that the terahertz wave is When the resonance conditions are met, Fano resonance occurs.

[0048] In the speci...

Embodiment 2

[0056] This embodiment provides a method for preparing a terahertz waveguide sensor device based on a Fano resonance coupling resonator cavity as described above, the principle of which is as follows:

[0057] Clean the substrate silicon wafer;

[0058] Spin-coat photoresist on the substrate silicon wafer;

[0059] Electron beam exposure according to the required pattern and pre-calculated structural parameters;

[0060] Develop and fix the photoresist after electron beam exposure;

[0061] Etching the slot waveguide and rectangular resonant cavity;

[0062] Remove the excess photoresist to obtain a waveguide-rectangular cavity-silicon wall structure made of silicon;

[0063] A gold film is grown on the outer surface of the silicon waveguide-rectangular resonator-silicon wall structure to obtain a waveguide-rectangular resonator-metal wall structure;

[0064] Clean the waveguide-rectangular resonant cavity-metal wall structure to obtain a terahertz waveguide sensor device ...

Embodiment 3

[0075] Transmission curve test of terahertz metal dielectric waveguide device based on Fano resonance coupled resonator:

[0076] The terahertz wave is incident along the waveguide from the input end at a distance of 60 μm from the center of the rectangular resonant cavity. During the transmission process, a part of it will couple with the resonant cavity and enter the resonant cavity, resulting in narrow-band discrete modes, such as image 3 The curve in "Rectangular cavity only" is shown; part of it will be reflected back by the reflection of the metal wall, resulting in a broadband continuous mode, such as image 3 As shown in the curve "Only the metal wall" in ; under the interaction between the two modes, when the resonance condition is met, a highly transmissive, sharp Fano resonance is detected at the waveguide output at a distance of 60 μm from the center of the resonator, Such as image 3 The curves in "Complete Structure" are shown. The metal material is gold, and ...

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Abstract

The invention belongs to the technical field of terahertz sub-wavelength structure sensing, and provides a terahertz waveguide sensing device based on a Fano resonance coupling resonant cavity and a preparation method thereof. The terahertz waveguide sensing device based on the Fano resonance coupling resonant cavity comprises a substrate and a waveguide sensing unit, the waveguide sensing unit is arranged on the substrate and comprises a waveguide, a rectangular resonant cavity and a metal wall, and the rectangular resonant cavity is directly connected to one side of the waveguide in the direction perpendicular to the waveguide. The metal wall is arranged in the waveguide medium at a set distance on one side of the rectangular resonant cavity, and the center of the metal wall is provided with an aperture; and the direction of the rectangular resonant cavity is kept parallel to the polarization direction of the electric field, and the input end of the waveguide is used for receiving terahertz waves, so that Fano resonance is generated when the terahertz waves meet resonance conditions in the transmission process. By adopting a metal-medium-metal waveguide coupling resonant cavity structure, the refractive index sensing application with sharp Fano resonance, high Q factor and high sensitivity is realized.

Description

technical field [0001] The invention belongs to the technical field of terahertz sub-wavelength structure sensing, and in particular relates to a terahertz waveguide sensor device based on a Fano resonance coupling resonator cavity and a preparation method thereof. Background technique [0002] The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art. [0003] Metal-dielectric-metal (MDM) waveguides are the most promising devices for realizing nanoscale devices because of their deep subwavelength confinement of light, low loss, long propagation distance, and relative ease of fabrication. Several MDM waveguide-based structures have been demonstrated numerically and experimentally to realize various applications in the THz band, such as filters, optical resonators, sensors. At present, the research based on MDM waveguide in the terahertz frequency band mainly focuses on the filter, and th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
CPCG01N21/41G01N2021/4166
Inventor 时彦朋李美坪刘笑宇宋金梅
Owner SHANDONG UNIV
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