Self-driven humidity sensor and preparation method thereof

Abstract

The invention discloses a self-driven humidity sensor and a preparation method thereof. The self-driven humidity sensor comprises a semiconductor substrate, a nanostructure is etched on the front face of the semiconductor substrate, a dielectric layer is prepared on the front face of the semiconductor substrate around the nanostructure, a suspension electrode is prepared on the dielectric layer, a gap is formed between the suspension electrode and the nanostructure, a pore channel structure is etched on the suspension electrode and located above the nanostructure, a bottom electrode is prepared on the back face of the semiconductor substrate, and the bottom electrode and the suspension electrode are both connected with wires. The humidity sensor disclosed by the invention does not need an additional power supply, and can realize direct output of humidity-related electric signals. Due to the self-driving characteristic of the humidity sensor, the humidity response speed of the sensor is high and reaches the millisecond level. The humidity sensor is simple in structure, facilitates reduction of production cost, is compatible with a traditional semiconductor technology, and facilitates product integration.

Description

technical field [0001] The invention relates to the technical field of humidity sensors, in particular to a self-driven humidity sensor and a preparation method thereof. Background technique [0002] The humidity sensor is the simplest humidity sensor. There are two main types of humidity sensors: resistive and capacitive. The characteristic of the humidity sensitive resistor is that the substrate is covered with a film made of moisture-sensitive material. When the water vapor in the air is adsorbed on the moisture-sensitive film, the resistivity and resistance value of the element will change. Using this characteristic Humidity can be measured. Humidity-sensitive capacitors are generally made of polymer film capacitors. Commonly used polymer materials include polystyrene, polyimide, and cellulose acetate. When the ambient humidity changes, the dielectric constant of the humidity-sensitive capacitor changes, so that the capacitance also changes, and the capacitance change...

AI Technical Summary

Problems solved by technology

[0016] In summary, the existing humidity sensors require additional power input, which increases the power consumption of the device and increases the complexity of the structure. At the same time, the existing humidity sensors have the problems of slow response speed and high cost.

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