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Piezoelectric acoustic transducer with filtering effect and manufacturing method thereof

An acoustic transducer and piezoelectric technology, applied in piezoelectric/electrostrictive transducer microphones, microphones, sensors, etc., can solve the problem of poor sound pickup effect, and achieve the effect of improving sound pickup quality

Active Publication Date: 2021-08-27
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention solves the problem of poor sound pickup effect of piezoelectric MEMS microphones in the prior art by providing a piezoelectric acoustic transducer with filtering function and a manufacturing method thereof

Method used

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  • Piezoelectric acoustic transducer with filtering effect and manufacturing method thereof
  • Piezoelectric acoustic transducer with filtering effect and manufacturing method thereof
  • Piezoelectric acoustic transducer with filtering effect and manufacturing method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0048] Embodiment 1 provides a piezoelectric acoustic transducer with filtering effect, see Figure 9 , the diaphragm 52 adopts a cantilever beam structure with a central fixing method, and the central fixed end of the diaphragm 52 is established on the filter layer 56 .

[0049] The filter layer 56 includes a support column 57 , and the support column 57 serves as a support for the diaphragm 52 , and the filter layer 56 defines the through hole 53 in a region other than the support column 57 . The diaphragm 52 can be divided into multiple diaphragms.

Embodiment 2

[0051] The diaphragm 52 adopts a cantilever beam structure with a peripheral fixing method, and the peripheral fixed end of the diaphragm 52 is built on the substrate 51, as image 3 shown. The diaphragm 52 can be divided into multiple diaphragms.

Embodiment 3

[0053] Embodiment 3 provides the manufacturing method of the piezoelectric acoustic transducer with filtering effect as described in embodiment 1 or embodiment 2, specifically the manufacturing method of MEMS chip, comprising the following steps:

[0054] Step 1. Select a silicon wafer as the first insulating layer 513, and form a cavity structure on the silicon wafer through photolithography and etching processes;

[0055] Step 2, deposit silicon dioxide 541 in the cavity structure, and use a chemical mechanical polishing process to polish the surface; see Figure 5 (corresponding to embodiment 2), Figure 11 (corresponding to embodiment 1);

[0056] Step 3, bonding a composite layer composed of a transition layer 512 and a second insulating layer 511 on the silicon wafer with the cavity structure;

[0057] Step 4, sequentially depositing materials on the composite layer to form a structural layer, the structural layer is used as the diaphragm 52; see Figure 6 (correspond...

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Abstract

The invention belongs to the technical field of MEMS piezoelectric device and semiconductor manufacturing, and discloses a piezoelectric acoustic transducer with a filtering effect and a manufacturing method thereof. The piezoelectric acoustic transducer comprises a shell, a substrate and an MEMS chip. An accommodating cavity is defined by the shell and the substrate, a sound hole is formed in the substrate, and the sound hole is communicated with the accommodating cavity; the MEMS chip comprises a substrate, a vibrating diaphragm and a filtering layer; one end of the substrate is connected with the base plate, the vibrating diaphragm is connected to the other end, away from the base plate, of the substrate, a back cavity is formed between the vibrating diaphragm and the base plate, the filtering layer divides the back cavity into a top back cavity and a bottom back cavity, and a plurality of through holes are formed in the filtering layer and correspond to a plurality of sectional areas with different sizes. According to the invention, clutter signals can be effectively filtered, so that the microphone has a good pickup effect.

Description

technical field [0001] The invention belongs to the technical field of MEMS piezoelectric devices and semiconductor manufacturing, and more specifically relates to a piezoelectric acoustic transducer with filtering function and a manufacturing method thereof. Background technique [0002] An acoustic transducer is an energy conversion device that converts sound signals into electrical signals in different ways. A piezoelectric acoustic transducer is an energy conversion device that converts an acoustic signal into an electrical signal by using the piezoelectric effect. For example, a piezoelectric MEMS microphone is a typical piezoelectric acoustic transducer. In recent years, due to the advantages of small size, stable performance, high signal-to-noise ratio, good sensitivity and fast response, piezoelectric MEMS microphones have been widely used in smart wearable devices and smartphones. [0003] When the microphone is picking up sound, it is inevitable that there will be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R17/02H04R31/00
CPCH04R17/02H04R31/00H04R2201/003
Inventor 孙成亮杨超翔胡博豪林炳辉王雅馨
Owner 武汉敏声新技术有限公司