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Novel graphene growth device capable of vertical lifting and rapid cooling

A vertical lifting and rapid cooling technology, applied in the field of chemical production, can solve the problems of uneven temperature, safety, convenience and controllability, uneven airflow, etc.

Pending Publication Date: 2021-08-31
深圳华梦通讯技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] It is the work of the present invention to design a stable, safe, convenient and controllable graphene CVD reaction device that overcomes the uneven air flow brought by the 8-inch quartz tube and the uneven temperature by utilizing novel structures and parameters.

Method used

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  • Novel graphene growth device capable of vertical lifting and rapid cooling
  • Novel graphene growth device capable of vertical lifting and rapid cooling
  • Novel graphene growth device capable of vertical lifting and rapid cooling

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Embodiment Construction

[0019] figure 1 It is a schematic diagram of a novel large-scale graphene CVD device of the present invention.

[0020] refer to figure 1 , a novel vertical lifting rapid cooling graphene growth device, characterized in that it includes a (2) 8-inch quartz tube for graphene CVD growth, a (7) vacuum tube electric furnace for controlling the graphene CVD growth temperature , (1) vertical rails, (3) brackets at both ends, (4) horizontal platform, (6) vertical lifting brackets, (8) horizontal rails and other supporting structures. The heating temperature and position of the electric furnace can be controlled by adding an intelligent control terminal, which is convenient for users to use.

[0021] In the present invention, the vertical lifting frame is installed on the guide rail, so that the vacuum tube electric furnace can perform vertical and horizontal displacement at the same time, and the movement is more flexible.

[0022] In the present invention, after the reaction is f...

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Abstract

The invention discloses a novel graphene growth device capable of vertical lifting and rapid cooling. The device comprises an 8-inch quartz tube for CVD (chemical vapor deposition) growth of graphene, a vacuum tube type electric furnace for controlling the CVD growth temperature of the graphene, a lifting frame, a metal bottom plate, two parallel guide rails and other supporting structures. The quartz tube is fixed at the central position of the vacuum tube furnace through a supporting structure. A guide rail and an electric lifting frame are used for controlling horizontal and vertical displacement of the vacuum tube type electric furnace, so that closing and opening of the vacuum tube type electric furnace are automatically controlled. By means of the design, the occupied area of the graphene CVD device can be reduced, and the cooling time in the CVD process is shortened.

Description

technical field [0001] The invention relates to the technical field of chemical production, in particular to equipment for preparing large-size graphene by CVD. Background technique [0002] Graphene is a single-layer two-dimensional material composed of carbon six-membered rings, and its thickness is only one atom thick, making it the thinnest material in the world. At the same time, graphene is also the first two-dimensional material discovered in the world, and it has many superior properties that traditional materials do not have. Graphene has very broad application prospects in electronic, optoelectronic, and photonic devices. [0003] In recent years, graphene has attracted much attention in the field of materials due to its superior physical properties, and various preparation methods of graphene have been developed, including mechanical exfoliation, redox graphene, CVD, epitaxial growth, high-temperature catalytic graphitization of organic matter, etc. . Among the...

Claims

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Application Information

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IPC IPC(8): C01B32/186
CPCC01B32/186
Inventor 钱正芳梁豪周灿钦
Owner 深圳华梦通讯技术有限公司
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