MEMS micro-mirror array intelligent glass plate for tracking light condensation

Abstract

An MEMS micro-mirror array intelligent glass plate for tracking light condensation comprises a control circuit, a feedback circuit, a micro-mirror glass plate and a solar altitude sensor; the micro-mirror glass plate comprises an MEMS micro-mirror array formed by a plurality of micro-mirrors, and each micro-mirror sequentially comprises a substrate, a lower electrode layer, a protective layer, a sacrificial layer, a supporting layer, a metal layer, a compensation layer, an upper electrode layer and a glass layer from bottom to top, wherein the upper electrode layer and the glass layer are suspended; each metal layer comprises a fixed part, a rotating part and a hinging piece, the corresponding compensation layer and the corresponding supporting layer are arranged on the upper side and the lower side of the rotating part of the metal layer respectively, and the rotating part, the supporting layer and the compensation layer jointly form a cantilever; each upper electrode layer, each lower electrode layer and each metal layer are electrically connected with a voltage output end positive electrode and a voltage output end negative electrode of the control circuit respectively; the magnitude of voltage is adjusted through data provided by the solar altitude sensor, and a single micro-mirror is driven to perform angle deflection. According to the invention, the micro-mirrors can be deflected by 0 to 90 degrees to adapt to the change of the solar elevation angle, so that the function of tracking light condensation is achieved.

Description

technical field [0001] The invention belongs to the technical field of solar energy, and relates to an improvement of a solar energy spotlight tracking structure, in particular to a MEMS micromirror array smart glass plate for tracking spotlight. Background technique [0002] Solar energy is known as the cleanest energy on earth, but it is limited by the materials of solar cells, the loss of photovoltaic modules, the uneven irradiation caused by different geographical locations, and the waste of light energy caused by the constant change of the sun's direction, resulting in the efficiency of solar power generation. affected. The solar concentrated light tracking device can make the solar panel face the sun at any time, and let the light irradiate the solar panel vertically at any time, which can significantly improve the power generation efficiency of the solar photovoltaic module. [0003] For example, a Chinese patent (authorized notification number CN202110446U) disclose...

AI Technical Summary

Problems solved by technology

[0004] The spotlight tracking devices used in existing solar power generation equipment are large in size, complex in structure, bulky and low in spotlight precision, which affects the efficiency of solar power generation; most of them are mechanical structures, consume a lot of energy, and are not easy to achieve Solar panel deflection angle control

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