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Optical feedback structure and packaging method thereof

An optical feedback and laser technology, applied in the semiconductor field, can solve the problems of large far-field divergence angle and the inability to use the output light spot directly, and achieve the effect of high coupling efficiency, avoiding difficult adjustment and calibration, and good material adaptation.

Active Publication Date: 2022-05-17
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0003] However, in the prior art, adjusting the far field by adjusting the ridge width of the bar laser has great uncertainty, and the divergence angle of the far field is large, and the output spot cannot be used directly.

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  • Optical feedback structure and packaging method thereof
  • Optical feedback structure and packaging method thereof
  • Optical feedback structure and packaging method thereof

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Embodiment Construction

[0052] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0053] The far-field pattern of the semi-insulating surface plasmon terahertz quantum cascade laser is related to the width of the light-emitting ridge of the bar laser: when the ridge width is narrow, the lasing mode is the first laser mode, showing the far-field distribution of a single-lobe Gaussian beam , the far-field divergence angle is ~30°×40°; when the ridge width gradually increases, the second laser mode starts to excite, and the far-field pattern of the laser is determined by the superposition of the first laser mode and the second laser mode; the ridge width continues to increase, only The second laser mode is emitted, the first laser mode is annihilated, and the output far field presents a double-lobe dis...

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Abstract

The disclosure provides an optical feedback structure and a packaging method thereof, including a terahertz quantum cascade laser and a high-resistance silicon hypersphere mirror, the center of the incident plane of the high-resistance silicon hypersphere mirror is located in the terahertz quantum cascade In the front face of the laser, the incident plane of the high-resistance silicon hypersphere mirror is used to collect the laser light emitted by the terahertz quantum cascade laser, and the exit spherical surface of the high-resistance silicon hypersphere mirror is used to feed back and converge the The laser emitted by the terahertz quantum cascade laser increases the lasing intensity of the second laser mode of the terahertz quantum cascade laser, so as to control the first laser mode and the second laser mode of the terahertz quantum cascade laser strength ratio. The present disclosure also provides a packaging method capable of realizing high-efficiency output of terahertz small-sized flat-hat Gaussian beams.

Description

technical field [0001] The present disclosure relates to the technical field of semiconductors, in particular to an optical feedback structure and a packaging method thereof. Background technique [0002] The flat-topped Gaussian beam is a laser beam with almost uniform flux (energy density) in a circular area. The high-power, small-sized THz flat-topped Gaussian beam has strong effects in the fields of close-range biological cell detection and imaging. Application requirements. [0003] However, in the prior art, adjusting the far field by adjusting the ridge width of the bar laser has great uncertainty, and the divergence angle of the far field is relatively large, so the output spot cannot be used directly. Contents of the invention [0004] The present disclosure provides an optical feedback structure and a packaging method thereof, which can realize high-efficiency output of a small-sized flat-topped Gaussian beam of a terahertz quantum cascade laser. [0005] In or...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/0225H01S5/02315H01S5/02326H01S5/06H01S5/065H01S5/20H01S5/00G02B5/00
CPCH01S5/20H01S5/06H01S5/0085H01S5/0651H01S5/0225H01S5/02315H01S5/02326G02B5/008
Inventor 李媛媛刘俊岐刘峰奇骆军委翟慎强张锦川卓宁王利军刘舒曼梁平胡颖
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI