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Method and device for positioning carrier plate in film-forming equipment

A positioning method and film-forming equipment technology, applied in transportation and packaging, gaseous chemical plating, coating, etc., can solve problems such as inaccurate positioning, shrinkage, and increased time for the carrier board process

Pending Publication Date: 2021-09-14
宣城睿晖宣晟企业管理中心合伙企业(有限合伙)
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the carrier board is in high-speed transmission, although it will start and stop when it touches the sensor transmission system, the carrier board will also slide forward under the action of inertia, resulting in inaccurate positioning; if the carrier board is in low-speed transmission, it will touch the sensor transmission system. It will stop immediately, and the forward sliding distance of the carrier will be smaller, but the carrier is always kept at a low speed during the transmission process, which will increase the process time of the carrier in the chamber, affecting the efficiency and tact of the equipment

Method used

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  • Method and device for positioning carrier plate in film-forming equipment
  • Method and device for positioning carrier plate in film-forming equipment
  • Method and device for positioning carrier plate in film-forming equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0070] First, refer to image 3 , to describe the film forming apparatus 100 in Embodiment 1 of the present application. The film forming apparatus 100 includes a vacuum chamber, a control unit, and a transfer system. The vacuum chamber includes a front gate valve 101 , a lower electrode 103 , a rear gate valve 108 and a shower electrode 109 . exist figure 1 In , reference numeral 105 indicates a carrier, and reference numeral 104 indicates an ideal positioning position of the carrier.

[0071] In Embodiment 1, three position detection sensors, namely, the first position detection sensor 102 , the second position detection sensor 106 and the third position detection sensor 107 are provided. The first position detection sensor 102, the second position detection sensor 106, and the third position detection sensor 107 are symmetrically arranged on both sides of the outside of the vacuum chamber. When the carrier plate 105 moves to the position of the corresponding position det...

Embodiment 1-1

[0080] Hereinafter, Modified Embodiment 1-1 of Embodiment 1 is described, and portions not explicitly described in this embodiment may be the same as those in Embodiment 1.

[0081] In Embodiment 1, the carrier board 105 starts to decelerate after triggering the second position detection sensor 106. In the modified embodiment 1-1, the carrier board 105 starts the deceleration process and starts timing after passing the first position detection sensor 102 at high speed. Stop the drive when finished.

Embodiment 1-2

[0083] Hereinafter, Modified Embodiments 1-2 of Embodiment 1 are described, and portions not explicitly described in this embodiment may be the same as those in Embodiment 1.

[0084] In Embodiment 1, the carrier board 105 starts to decelerate after triggering the second position detection sensor 106, and in Modified Embodiment 1-2, the carrier board 105 stops after reaching the second position detection sensor 106 at high speed, and then starts again at a low speed Stop the transmission after the timing starts and waits for the timing to end.

[0085] In Embodiment 1 and Modified Embodiments 1-1 and 1-2, three position detection sensors that are parallel to the horizontal transmission direction and can detect the position of the carrier plate 105 are provided in the vacuum chamber respectively. The positional relationship of the three position detection sensors is that the first position detection sensor 102 and the third position detection sensor 107 are symmetrically distri...

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PUM

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Abstract

The invention provides a method and a device for positioning a carrier plate in film-forming equipment. The method comprises the following steps: presetting a first position and a second position, wherein the first position is a position where the carrier plate conveyed in the film forming equipment starts to decelerate in a forward direction, and the second position is a target stop position of the carrier plate; setting the speed of the carrier plate at the first position; setting motion parameters of the carrier plate according to the distance between the first position and the second position and the speed at the first position, wherein the motion parameters of the carrier plate can enable the carrier plate to stop at the second position; and controlling the motion of the carrier plate according to the motion parameters. The invention further provides the device for positioning the carrier plate in the film-forming equipment. According to the treatment scheme, the film coating efficiency of the film forming equipment is improved.

Description

technical field [0001] The invention relates to the technical field of solar cell preparation, in particular to a positioning method and device for a carrier plate in film forming equipment. Background technique [0002] In the process of solar cell preparation, the existing coating system includes a coating chamber and conveying equipment. In order to control the carrier plate carrying the substrate, detection equipment is usually installed at the entrance or exit of the coating chamber, that is, a sensor system is used. To detect the position of the carrier plate, accurately control the closing and opening of the entrance gate valve and the exit gate valve of the coating chamber, so as to avoid the situation that the entrance gate valve or the exit gate valve crushes the substrate. [0003] In the prior art, two sensors are arranged, which are installed perpendicular to the center of the conveying direction, and a reflector is arranged at a corresponding position at the bo...

Claims

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Application Information

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IPC IPC(8): H01L21/68H01L21/677H01L31/18C23C16/50C23C16/52
CPCH01L21/67739H01L21/68H01L31/18C23C16/50C23C16/52Y02P70/50
Inventor 不公告发明人
Owner 宣城睿晖宣晟企业管理中心合伙企业(有限合伙)