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Gas laser electrode and gas laser

A gas laser and electrode technology, applied in the laser field, can solve the problems of high cost and difficult processing

Pending Publication Date: 2021-09-14
RAINBOW SOURCE LASER RSLASER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of this application is to provide a gas laser electrode and a gas laser using the electrode, aiming to solve the technical problems of high cost and difficult processing in the prior art when suppressing shock wave energy

Method used

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  • Gas laser electrode and gas laser

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Embodiment 1

[0030] figure 1 It is a structural schematic diagram of an embodiment of the present application.

[0031] The cathode 201 and the anode 202 are arranged opposite to each other, both are strip-shaped electrodes, and the material is one of metal materials such as brass, aluminum, and nickel. The cross-sectional shape of the strip electrode is a combination of a trapezoid and a rectangle, and the long side of the rectangle is attached to the lower bottom of the trapezoid. The cathode 201 is provided with high voltage by a high voltage pulse power supply; the anode 202 is grounded. On the surface of the cathode 201 and the anode 202 , a discharge surface 203 , a shock wave suppression surface 204 and a transition surface 205 are included. Wherein the discharge surface 203 is the upper bottom of the trapezoid, and the shock wave suppression surface 204 and the transition surface 205 are located on the waist of the trapezoid. The discharge surface 203 is a glow discharge area, a...

Embodiment 2

[0036] Such as figure 2 As shown, in this embodiment, several grooves 204-1 are provided on the shock wave suppression surface 204 provided on the cathode 201. The grooves 204-1 are rectangular grooves, and the extending direction of the rectangular groove is the same as that of the cathode 201. The grooves are parallel to each other, the depth of the rectangular grooves is 1 mm, and the width of each rectangular groove is 0.5 mm.

Embodiment 3

[0038] Such as image 3 As shown, in this embodiment, several grooves 204-1 are provided on the shock wave suppression surface 204 provided on the cathode 201. The grooves 204-1 are rectangular grooves, and the extending direction of the rectangular groove is the same as that of the cathode 201. The grooves are not parallel to each other, the depth of the rectangular grooves is 3 mm, and the width of each rectangular groove is 1 mm.

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Abstract

The invention relates to the technical field of laser, and discloses a gas laser electrode and a gas laser using the same. The gas laser electrode comprises an anode and a cathode which are oppositely arranged; and the surface of the anode and / or the surface of the cathode are / is provided with a discharge surface and shock wave suppression surfaces arranged on one side or two sides of the discharge surface, and a plurality of grooves are formed in the shock wave suppression surfaces and used for scattering shock waves. According to the gas laser electrode, the surface structure capable of scattering shock waves and preventing shock wave reflection is arranged in the non-discharge area of the gas laser electrode, so that the reflected shock waves between the electrodes are effectively inhibited on the basis that the electrodes can carry out stable glow discharge, and the influence of the reflected shock waves on discharge and light emitting performance is reduced.

Description

technical field [0001] The present application relates to the field of laser technology, in particular to a gas laser electrode and a gas laser using the electrode. Background technique [0002] In discharge-pumped pulsed gas lasers, especially excimer lasers with high repetition rate, there is a disturbance similar to a micro-explosion, that is, the discharge shock wave phenomenon. This is because when the high-voltage pulse power supply of the gas laser pumps the discharge medium gas, 2-4J of energy will be injected into it within about 100ns. The study found that a considerable part of the energy is instantly deposited on the surface of the cathode and anode, and its rapid expansion will generate a cylindrical shock wave originating from the electrode surface. The cathode and anode shock waves are reflected back and forth between the electrode and its subsidiary structures, and it is not until 200μs that it basically calms down. This repeatedly reflected shock wave will...

Claims

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Application Information

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IPC IPC(8): H01S3/038
CPCH01S3/0381H01S3/0382H01S3/0385
Inventor 刘斌丁金滨陈文斌沙鹏飞冯泽斌江锐周翊
Owner RAINBOW SOURCE LASER RSLASER