Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Method for improving white light dispersion confocal three-dimensional measurement efficiency

A dispersive confocal, three-dimensional measurement technology, which is applied to measurement devices, optical devices, instruments, etc., can solve the limitations of white-light dispersive confocal three-dimensional measurement technology. Spectral data processing rate, lack of in-depth research on measurement efficiency, and fast measurement speed problem, to achieve the effect of real-time automatic extraction of peak wavelength, fast detection speed and low cost

Active Publication Date: 2021-09-28
XI AN JIAOTONG UNIV
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Currently, the white light dispersion confocal three-dimensional measurement technology is limited by the speed of spectral data processing and X-Y mechanical scanning, which is practically limited in the field of engineering applications
Existing methods to improve the efficiency of white light dispersion confocal three-dimensional measurement include: using a multispectral camera for multiple acquisitions, which has a limited speed and high cost; The transmittance of the detector is used to detect the peak wavelength. This method has fast measurement speed but poor accuracy.
[0003] At present, domestic research on white light confocal three-dimensional measurement technology mainly focuses on theoretical and experimental exploration, precision testing, such as the development of high-performance dispersive objective lenses and the construction of high-precision measurement systems. There is still a lack of measurement efficiency in actual use. in-depth study

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for improving white light dispersion confocal three-dimensional measurement efficiency
  • Method for improving white light dispersion confocal three-dimensional measurement efficiency
  • Method for improving white light dispersion confocal three-dimensional measurement efficiency

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0030] The implementation of the present invention will be described in detail below in conjunction with the drawings and examples.

[0031] The working principle of the white light dispersion confocal three-dimensional measurement technology is to encode the wavelength-object surface height, and extract the maximum peak wavelength to perform decoding to obtain the object surface height. Among them, the decoding work is completed by means of the spectrometer, an important part of the microscope. The spectrometer transmits the collected spectral information to the host computer and uses the CPU to extract the wavelength, and finally realizes the three-dimensional measurement. The two places where this decoding work takes the longest are: time-consuming data transmission and time-consuming image processing. In the invention, the algorithm is transplanted, and the intelligent spectrum detection device driven by the FPGA chip completes the wavelength extraction work of the upper c...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Wavelengthaaaaaaaaaa
Login to View More

Abstract

The invention relates to a method for improving white light dispersion confocal three-dimensional measurement efficiency, which can process pixel information output from a linear array CCD chip in parallel in real time, thereby saving time for transmitting data to an upper computer and time consumed by CPU serial calculation. The device for realizing the method comprises a light splitting light path part and a spectral information detector part, wherein the light splitting light path part comprises a slit, a concave spherical reflection collimating mirror, a reflection grating and a concave spherical reflection focusing mirror; the spectral information detector part comprises a linear array CCD chip which is arranged at the focusing position of the concave spherical reflection focusing mirror and is used for converting an optical signal into an analog signal; the A / D conversion chip is connected with the linear array CCD chip and converts analog signals of the linear array CCD chip into digital signals; and the FPGA chip is connected with the linear array CCD chip and the A / D conversion chip, carries out sequential control on the linear array CCD chip and the A / D conversion chip, receives the digital signals and carries out image processing. The method provided by the invention is high in data processing speed, and can meet the requirements of white light dispersion confocal real-time three-dimensional measurement.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, in particular to a method for improving the efficiency of confocal three-dimensional measurement of white light dispersion. Background technique [0002] White light dispersion confocal measurement technology is suitable for the measurement of surface profile, step and transparent material thickness of almost any reflectivity, and has broad application prospects in single-layer / multi-layer material thickness, micro-displacement, micro-deformation, surface topography detection, etc. And very good engineering application value. The general white light dispersion confocal measurement technology belongs to the point measurement technology, but compared with the traditional confocal measurement method, the white light dispersion confocal replaces the axial mechanical scanning by wavelength coding. At present, white light dispersion confocal three-dimensional measurement technolo...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01B9/02
CPCG01B9/02042
Inventor 刘涛袁野张莉胡佳琪杨树明
Owner XI AN JIAOTONG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com