Method for improving white light dispersion confocal three-dimensional measurement efficiency

Abstract

The invention relates to a method for improving white light dispersion confocal three-dimensional measurement efficiency, which can process pixel information output from a linear array CCD chip in parallel in real time, thereby saving time for transmitting data to an upper computer and time consumed by CPU serial calculation. The device for realizing the method comprises a light splitting light path part and a spectral information detector part, wherein the light splitting light path part comprises a slit, a concave spherical reflection collimating mirror, a reflection grating and a concave spherical reflection focusing mirror; the spectral information detector part comprises a linear array CCD chip which is arranged at the focusing position of the concave spherical reflection focusing mirror and is used for converting an optical signal into an analog signal; the A / D conversion chip is connected with the linear array CCD chip and converts analog signals of the linear array CCD chip into digital signals; and the FPGA chip is connected with the linear array CCD chip and the A / D conversion chip, carries out sequential control on the linear array CCD chip and the A / D conversion chip, receives the digital signals and carries out image processing. The method provided by the invention is high in data processing speed, and can meet the requirements of white light dispersion confocal real-time three-dimensional measurement.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement, in particular to a method for improving the efficiency of confocal three-dimensional measurement of white light dispersion. Background technique [0002] White light dispersion confocal measurement technology is suitable for the measurement of surface profile, step and transparent material thickness of almost any reflectivity, and has broad application prospects in single-layer / multi-layer material thickness, micro-displacement, micro-deformation, surface topography detection, etc. And very good engineering application value. The general white light dispersion confocal measurement technology belongs to the point measurement technology, but compared with the traditional confocal measurement method, the white light dispersion confocal replaces the axial mechanical scanning by wavelength coding. At present, white light dispersion confocal three-dimensional measurement technolo...

AI Technical Summary

Problems solved by technology

Currently, the white light dispersion confocal three-dimensional measurement technology is limited by the speed of spectral data processing and X-Y mechanical scanning, which is practically limited in the field of engineering applications

Existing methods to improve the efficiency of white light dispersion confocal three-dimensional measurement include: using a multispectral camera for multiple acquisitions, which has a limited speed and high cost; The transmittance of the detector is used to detect the peak wavelength. This method has fast measurement speed but poor accuracy.

[0003] At present, domestic research on white light confocal three-dimensional measurement technology mainly focuses on theoretical and experimental exploration, precision testing, such as the development of high-performance dispersive objective lenses and the construction of high-precision measurement systems. There is still a lack of measurement efficiency in actual use. in-depth study

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