A wax spray method for reducing the corrosion dispersion of quartz wafer sheets

A chip corrosion and quartz technology, applied in the field of frequency components, can solve the problems of large corrosion dispersion of quartz wafers, etc., to achieve the effects of reducing dispersion, good versatility, and improving consistency

Active Publication Date: 2022-07-29
HUBEI TKD ELECTRONICS TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of large corrosion dispersion of quartz wafers in the prior art, provide a wax spraying method to reduce the corrosion dispersion of quartz WAFER sheets, and then improve the pass rate of mass production of products

Method used

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  • A wax spray method for reducing the corrosion dispersion of quartz wafer sheets
  • A wax spray method for reducing the corrosion dispersion of quartz wafer sheets
  • A wax spray method for reducing the corrosion dispersion of quartz wafer sheets

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Embodiment Construction

[0030] see Figure 1 to Figure 6 , a wax spray method for reducing the corrosion dispersion of quartz WAFER sheets, comprising the following steps:

[0031] 1) Process the incoming WAFER sheet of the quartz wafer, and sequentially perform double-sided sputtering coating, gluing, exposure, development, metal etching, crystal etching, degumming, and demetallization to obtain a corroded hollow quartz wafer 1;

[0032] The double-sided sputtering coating is to coat metal Cr and Au on both sides of the WAFER sheet;

[0033] The double-sided gluing is to apply photoresist on both sides of the metal surface of the quartz wafer 1;

[0034] The double-sided exposure is to expose the quartz wafer 1 coated with the photoresist with an exposure machine, and the light and the photoresist will react to change the properties of the photoresist;

[0035] The developing is to remove the reacted photoresist with a developing solution;

[0036] The metal etching is to remove metal Cr and Au w...

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Abstract

A wax spraying method for reducing the corrosion dispersion of quartz WAFER sheets, comprising the steps of double-sided sputtering coating, gluing, exposing, developing, metal etching, crystal etching, degumming, demetallizing, frequency testing, spraying and the like. The invention solves the problem of large corrosion dispersion of the existing quartz wafers, and also improves the mass production qualification rate of products.

Description

technical field [0001] The invention belongs to the technical field of frequency components, relates to quartz wafers, and in particular relates to a wax spray method for reducing the corrosion dispersion of quartz WAFER sheets. Background technique [0002] With the development of information technology, the frequency generation and frequency control electronic devices quartz crystal devices in the communication field are developing towards small size, high frequency and high stability. Quartz wafers are developing in the direction of miniaturization and high frequency. The original cutting, grinding and polishing process can no longer meet the requirements of miniaturization of quartz wafers. It is particularly important to use lithography-based MEMS micro-nano processing technology to complete the manufacture of quartz wafers. A major difficulty in processing quartz wafers by photolithography is to control the corrosion spread of the entire wafer. In the prior art, the w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/18C23C14/34C23F1/02C30B33/10B05D1/02
CPCC23C14/185C23C14/34C23F1/02C30B33/10B05D1/02
Inventor 万杨吴丰顺栾兴贺张小伟杨飞黄祥秒黄大勇
Owner HUBEI TKD ELECTRONICS TECH
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