The invention provides a high-precision
force sensor chip packaging structure and a detection method, and the structure comprises a
ceramic pedestal, the top end of the
ceramic pedestal is provided with a first
accommodation groove, the lower part of the first
accommodation groove is provided with a second
accommodation groove, the second accommodation groove is communicated with the first accommodation groove, the connection part of the first accommodation groove and the second accommodation groove forms an accommodation area, and the first accommodation groove and the second accommodation groove are communicated with each other. A plurality of internal electrodes are arranged in the accommodating area; one end of the
crystal chip in the length direction is fixed in the accommodating area, the other end of the
crystal chip is suspended, a chip
electrode is arranged at the top end of the
crystal chip, and an
electrode pin of the chip
electrode is electrically connected with each internal electrode; the
metal sealing ring is arranged at the top end of the
ceramic base; the upper cover covers the top end of the
metal sealing ring; and the plurality of external electrodes are arranged on the outer side wall of the ceramic base at intervals. The chip packaging structure has the advantages that external force can be effectively transmitted into the oscillation area on the chip, the chip and the packaging structure both have high
force frequency coefficients, dynamic and static conditions are detected at the same time, and the high-precision effect of mechanical detection is achieved.