Snapshot type spectrum confocal sensor and measuring method thereof

Abstract

The invention discloses a snapshot type spectrum confocal sensor and a measuring method thereof, and relates to the technical field of sensors, the snapshot type spectrum confocal sensor comprises a collimating lens group, a first spectroscope, a correction plate, a micro lens array, a first focus lens, a volume grating and an area array detector, the collimating lens group is horizontally arranged, the first spectroscope is located under the collimating lens group, the first spectroscope is obliquely arranged by 45 degrees, the correction plate is horizontally arranged and located under the first spectroscope, the first focus lens is vertically arranged and located on the plane where the first spectroscope is located, the first focus lens is arranged on one side of the first spectroscope, and the first focus lens and the correction plate are in reflection mirror symmetry. The micro lens array is horizontally arranged and is positioned right below the correction plate; and according to the invention, an area array dispersion array and a system integrated nonlinear dispersion compensation method are adopted, morphology information acquisition of a snapshot type area is realized, and the method has a height or displacement resolution of micron or even dozens of nanometers.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a snapshot-type spectral confocal sensor and a measurement method thereof. Background technique [0002] Spectral confocal measurement sensors can be used for non-contact, fast displacement and distance measurement. The basic principle of the point-type spectral confocal displacement sensor currently used in the market is that the broadband light beam emitted by the point light source enters the dispersive objective lens through the optical fiber, and the light of different wavelengths converges at different positions along the axial direction under the axial dispersion of the objective lens. After the focused light spot is reflected or scattered by the surface to be measured, it is then refocused on the fiber end face by the dispersive objective lens. The core diameter of the fiber end face can be used as a small hole in confocal imaging to reduce the interference of...

AI Technical Summary

Problems solved by technology

The point-type spectral confocal displacement sensor can only measure one point of the measured surface. To measure a certain area shape, it is necessary to drive the measured object or the measuring sensor to perform two-dimensional scanning through the mobile platform, and the imaging time required will be longer. Very long, the system will become huge and complex, and factors such as jitter during the scanning process will affect the measurement accuracy

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