Non-contact rotation angular displacement measuring device and method

A non-contact, displacement measurement technology, applied in the field of laser measurement, can solve the problems of limiting the application range of electrical angular displacement sensors, installation errors, etc.

Active Publication Date: 2021-10-01
TSINGHUA UNIV
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Problems solved by technology

However, the capacitive angular displacement sensor will introduce installation errors duri...

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  • Non-contact rotation angular displacement measuring device and method
  • Non-contact rotation angular displacement measuring device and method
  • Non-contact rotation angular displacement measuring device and method

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[0042]In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below through implementation examples and in conjunction with the accompanying drawings. It should be emphasized that the following descriptions are only exemplary and used to explain the application, rather than to limit the scope and application of the present invention.

[0043] The serial numbers assigned to components in this document, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "on", "on the surface" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying th...

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Abstract

The invention relates to a non-contact rotation angular displacement measuring device and method, and the method comprises the steps: enabling a laser beam to pass through a measuring assembly, forming a first frequency laser beam and a second frequency laser beam, and scattering at an intersection point of a to-be-measured circular truncated cone to form a first measurement feedback beam and a second measurement feedback beam; and then enabling the laser to return to the laser emitting device and generate an interference effect with an original light field in the laser emitting device, and modulating the output power of the laser to obtain a modulated light beam. The detector receives the modulated light beam and converts the modulated light beam from an optical signal to an electric signal. The processing device calculates the angular displacement of the to-be-measured circular truncated cone according to the electric signal. Measurement is carried out through the feedback modulation phenomenon of laser, high precision and high resolution are achieved, and therefore the problem that installation errors occur in the using process of a capacitive grating type angular displacement sensor is solved. In addition, the detector can dynamically measure the angular displacement of the circular truncated cone to be measured by detecting the change of the light intensity and the phase in the modulated light beam in real time.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and relates to a non-contact rotational angular displacement measuring device and a measuring method. Background technique [0002] Rotary angular displacement measurement technology plays an important role in modern industry and is widely used in aerospace, laser precision measurement, electronic product manufacturing and other fields. There are two types of traditional angular displacement measurement: electrical angular displacement sensor and optical angular displacement sensing technology. The electrical sensor based on the capacitive angle measurement technology has the advantages of high precision, easy integration, and low power consumption. The principle is that the cross-sectional area of ​​the capacitor with a grid structure changes during rotation, resulting in a change in the capacitance value, thereby inverting the target rotation. information. However, the capacitive an...

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Application Information

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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 谈宜东徐欣代宗仁王一帆
Owner TSINGHUA UNIV
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