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Non-contact rotational angular displacement measuring device and measuring method

A non-contact, displacement measurement technology, applied in the field of laser measurement, can solve the problems of limiting the application range of electrical angular displacement sensors, installation errors, etc.

Active Publication Date: 2022-08-05
TSINGHUA UNIV
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Problems solved by technology

However, the capacitive angular displacement sensor will introduce installation errors during use, which severely limits the application range of the electrical angular displacement sensor.

Method used

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  • Non-contact rotational angular displacement measuring device and measuring method
  • Non-contact rotational angular displacement measuring device and measuring method
  • Non-contact rotational angular displacement measuring device and measuring method

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Embodiment Construction

[0042]In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below through implementation examples and in conjunction with the accompanying drawings. It should be emphasized that the following descriptions are merely exemplary and are used to explain the present application and are not intended to limit the scope and application of the present invention.

[0043] The serial numbers themselves, such as "first", "second", etc., for the components herein are only used to distinguish the described objects, and do not have any order or technical meaning. In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "on", "on the surface", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present applica...

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Abstract

The present application relates to a non-contact rotational angular displacement measuring device and a measuring method. The laser beam passes through the measuring component to form a laser beam of a first frequency and a laser beam of a second frequency, and scatters at an intersection point of a circular table to be measured to form a first measurement The feedback beam and the second measurement feedback beam then return to the laser emitting device and produce an interference effect with the original light field in the laser emitting device, and modulate the output power of the laser to obtain a modulated beam. The detector receives the modulated light beam and converts the modulated light beam from an optical signal to an electrical signal. The processing device calculates the angular displacement of the circular table to be measured according to the electrical signal. The measurement is carried out through the feedback modulation phenomenon of the laser, which has high precision and high resolution, so it solves the problem of installation error during the use of the capacitive grid angular displacement sensor. In addition, the detector can dynamically measure the angular displacement of a circular cone to be measured by detecting the changes of light intensity and phase in the modulated beam in real time.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and relates to a non-contact rotational angular displacement measurement device and a measurement method. Background technique [0002] Rotational angular displacement measurement technology plays an important role in modern industry and is widely used in aerospace, laser precision measurement, electronic product manufacturing and other fields. The traditional rotational angular displacement measurement mainly includes electrical angular displacement sensor and optical angular displacement sensing technology. The electrical sensor based on capacitive grid angle measurement technology has the advantages of high precision, easy integration and low power consumption. information. However, the capacitive grid angular displacement sensor will introduce installation errors during use, which seriously limits the application range of the electrical angular displacement sensor. SUMMARY OF TH...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 谈宜东徐欣代宗仁王一帆
Owner TSINGHUA UNIV
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